JPS5587437A - Method of detecting completion of dry etching - Google Patents

Method of detecting completion of dry etching

Info

Publication number
JPS5587437A
JPS5587437A JP16317178A JP16317178A JPS5587437A JP S5587437 A JPS5587437 A JP S5587437A JP 16317178 A JP16317178 A JP 16317178A JP 16317178 A JP16317178 A JP 16317178A JP S5587437 A JPS5587437 A JP S5587437A
Authority
JP
Japan
Prior art keywords
conductors
plate
block
quartz
dry etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16317178A
Other languages
English (en)
Inventor
Toshihiko Osada
Takeari Uema
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16317178A priority Critical patent/JPS5587437A/ja
Publication of JPS5587437A publication Critical patent/JPS5587437A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP16317178A 1978-12-26 1978-12-26 Method of detecting completion of dry etching Pending JPS5587437A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16317178A JPS5587437A (en) 1978-12-26 1978-12-26 Method of detecting completion of dry etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16317178A JPS5587437A (en) 1978-12-26 1978-12-26 Method of detecting completion of dry etching

Publications (1)

Publication Number Publication Date
JPS5587437A true JPS5587437A (en) 1980-07-02

Family

ID=15768582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16317178A Pending JPS5587437A (en) 1978-12-26 1978-12-26 Method of detecting completion of dry etching

Country Status (1)

Country Link
JP (1) JPS5587437A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022323A (ja) * 1983-07-18 1985-02-04 Rohm Co Ltd 絶縁層ドライエツチの終点検出方法
JPS6066475A (ja) * 1983-09-21 1985-04-16 Fujitsu Ltd 半導体装置の製造方法
US6127237A (en) * 1998-03-04 2000-10-03 Kabushiki Kaisha Toshiba Etching end point detecting method based on junction current measurement and etching apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022323A (ja) * 1983-07-18 1985-02-04 Rohm Co Ltd 絶縁層ドライエツチの終点検出方法
JPS6066475A (ja) * 1983-09-21 1985-04-16 Fujitsu Ltd 半導体装置の製造方法
US6127237A (en) * 1998-03-04 2000-10-03 Kabushiki Kaisha Toshiba Etching end point detecting method based on junction current measurement and etching apparatus

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