JPS5653885A - Low vacuum type electron beam working apparatus - Google Patents

Low vacuum type electron beam working apparatus

Info

Publication number
JPS5653885A
JPS5653885A JP13010479A JP13010479A JPS5653885A JP S5653885 A JPS5653885 A JP S5653885A JP 13010479 A JP13010479 A JP 13010479A JP 13010479 A JP13010479 A JP 13010479A JP S5653885 A JPS5653885 A JP S5653885A
Authority
JP
Japan
Prior art keywords
vacuum
electron gun
exhaust
low vacuum
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13010479A
Other languages
Japanese (ja)
Inventor
Tomoo Tashiro
Masahiro Kato
Sadao Obokata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dengensha Toa Co Ltd
Original Assignee
Dengensha Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dengensha Manufacturing Co Ltd filed Critical Dengensha Manufacturing Co Ltd
Priority to JP13010479A priority Critical patent/JPS5653885A/en
Publication of JPS5653885A publication Critical patent/JPS5653885A/en
Pending legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)

Abstract

PURPOSE: To make possible the reduction of vacuum exhausting time and the movement and posture controlling of an electron gun, in a low vacuum type electron beam working apparatus, by providing a high vacuum exhausting device to the electron gun in the vacuum chamber, evacuating the inside of the electron gun to a high vacuum and directly exhausting the exhaust air thereof into the vacuum chamber.
CONSTITUTION: The low vacuum chamber 1 of the low vacuum type electron beam working apparatus is evacuated to a required low vacuum atmosphere. When the intended degree of vacuum is attained, the high vacuum exhaust pump 4 coupled to the electron gun 3 is operated to exhaust the air in the electron gun 3 directly into the vacuum chamber 1. In this case, the exhaust side of the high vacuum exhaust device is held open directly to the low vacuum chamber; therefore, no auxiliary pump is required and the vacuum atmosphere necessary for vacuum working may be formed efficiently in a short time, thus the efficiency of practical work is considerably improved.
COPYRIGHT: (C)1981,JPO&Japio
JP13010479A 1979-10-09 1979-10-09 Low vacuum type electron beam working apparatus Pending JPS5653885A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13010479A JPS5653885A (en) 1979-10-09 1979-10-09 Low vacuum type electron beam working apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13010479A JPS5653885A (en) 1979-10-09 1979-10-09 Low vacuum type electron beam working apparatus

Publications (1)

Publication Number Publication Date
JPS5653885A true JPS5653885A (en) 1981-05-13

Family

ID=15026036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13010479A Pending JPS5653885A (en) 1979-10-09 1979-10-09 Low vacuum type electron beam working apparatus

Country Status (1)

Country Link
JP (1) JPS5653885A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2486041C1 (en) * 2011-12-01 2013-06-27 Федеральное государственное унитарное предприятие "Научно-производственный центр газотурбостроения "Салют" (ФГУП "НПЦ газотурбостроения "Салют") Electron beam welding unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2486041C1 (en) * 2011-12-01 2013-06-27 Федеральное государственное унитарное предприятие "Научно-производственный центр газотурбостроения "Салют" (ФГУП "НПЦ газотурбостроения "Салют") Electron beam welding unit

Similar Documents

Publication Publication Date Title
JPS57169242A (en) X-ray transferring device
JPS57134559A (en) Physical vapor deposition device
JPS5288900A (en) Ion beam machine tool
JPS5441075A (en) Conveying device between atmospheric pressure and vacuum
JPS55104044A (en) Evacuation method of fluorescent lamp
JPS548297A (en) Radioactive contamination preventing air-tight clothers
JPS5732885A (en) Evacuating device of electron beam welding device
JPS544061A (en) Test piece chamber for electronic microscope or the like
JPS537809A (en) Vacuum increasing apparatus
JPS5583143A (en) Exhaust system for electron beam equipment
JPS5549136A (en) Continuous working apparatus during pressure reduction
JPS5516475A (en) Plasma processing unit
JPS55128391A (en) Laser working method
JPS52135659A (en) Magnetron and its manufacturing method
JPS5424302A (en) Operating system of gas driven plant
JPS5434776A (en) Wafer handling method of ion injector
JPS5654207A (en) Concentrating method of oxygen
JPS5472952A (en) Electron beam equipment
JPS521714A (en) Vacum apparatus
JPS5423464A (en) Exhaust system for vacuum unit
JPS5738538A (en) Aging method for color picture tube
JPS611485A (en) Electron beam welding device
JPS5291643A (en) Field emission type electron gun
JPS51147097A (en) Laser processing method
JPS5249761A (en) Field emission electronic gun