JPS5658248A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5658248A
JPS5658248A JP13459079A JP13459079A JPS5658248A JP S5658248 A JPS5658248 A JP S5658248A JP 13459079 A JP13459079 A JP 13459079A JP 13459079 A JP13459079 A JP 13459079A JP S5658248 A JPS5658248 A JP S5658248A
Authority
JP
Japan
Prior art keywords
film
electrode
substrate
sio2
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13459079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS618578B2 (mo
Inventor
Juro Yasui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13459079A priority Critical patent/JPS5658248A/ja
Publication of JPS5658248A publication Critical patent/JPS5658248A/ja
Publication of JPS618578B2 publication Critical patent/JPS618578B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP13459079A 1979-10-17 1979-10-17 Production of semiconductor device Granted JPS5658248A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13459079A JPS5658248A (en) 1979-10-17 1979-10-17 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13459079A JPS5658248A (en) 1979-10-17 1979-10-17 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5658248A true JPS5658248A (en) 1981-05-21
JPS618578B2 JPS618578B2 (mo) 1986-03-15

Family

ID=15131931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13459079A Granted JPS5658248A (en) 1979-10-17 1979-10-17 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5658248A (mo)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57189481A (en) * 1981-05-18 1982-11-20 Matsushita Electric Industrial Co Ltd Sheathed heater

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57189481A (en) * 1981-05-18 1982-11-20 Matsushita Electric Industrial Co Ltd Sheathed heater

Also Published As

Publication number Publication date
JPS618578B2 (mo) 1986-03-15

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