JPS5680043A - Far ultraviolet exposing method - Google Patents

Far ultraviolet exposing method

Info

Publication number: JPS5680043A
Authority: JP; Japan
Prior art keywords: pulse; exposure; xenone; far ultraviolet; lamp
Prior art date: 1979-12-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP15768779A

Other languages

English (en)

Japanese (ja)

Other versions

JPS6229785B2 (fr

Inventor

Hitoshi Ito

Katsumi Mori

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NEC Corp

Original Assignee

NEC Corp

Nippon Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1979-12-05

Filing date

1979-12-05

Publication date

1981-07-01

1979-12-05 Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp

1979-12-05 Priority to JP15768779A priority Critical patent/JPS5680043A/ja

1981-07-01 Publication of JPS5680043A publication Critical patent/JPS5680043A/ja

1987-06-29 Publication of JPS6229785B2 publication Critical patent/JPS6229785B2/ja

Status Granted legal-status Critical Current

Links

238000000034 method Methods 0.000 title abstract 2
YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 abstract 1
CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 abstract 1
238000001816 cooling Methods 0.000 abstract 1
229910052805 deuterium Inorganic materials 0.000 abstract 1
238000004519 manufacturing process Methods 0.000 abstract 1
229920000642 polymer Polymers 0.000 abstract 1
239000010453 quartz Substances 0.000 abstract 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1

Landscapes

Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

JP15768779A 1979-12-05 1979-12-05 Far ultraviolet exposing method Granted JPS5680043A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP15768779A JPS5680043A (en)	1979-12-05	1979-12-05	Far ultraviolet exposing method

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP15768779A JPS5680043A (en)	1979-12-05	1979-12-05	Far ultraviolet exposing method

Publications (2)

Publication Number	Publication Date
JPS5680043A true JPS5680043A (en)	1981-07-01
JPS6229785B2 JPS6229785B2 (fr)	1987-06-29

Family

ID=15655186

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP15768779A Granted JPS5680043A (en)	1979-12-05	1979-12-05	Far ultraviolet exposing method

Country Status (1)

Country	Link
JP (1)	JPS5680043A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0762409A1 (fr) *	1995-08-15	1997-03-12	Dainippon Ink And Chemicals, Inc.	Procédé et dispositif pour coller des disques

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH01160359A (ja) *	1987-12-16	1989-06-23	Fuji Electric Co Ltd	直流・直流変換装置の制御方法

1979
- 1979-12-05 JP JP15768779A patent/JPS5680043A/ja active Granted

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0762409A1 (fr) *	1995-08-15	1997-03-12	Dainippon Ink And Chemicals, Inc.	Procédé et dispositif pour coller des disques
US5904795A (en) *	1995-08-15	1999-05-18	Dainippon Ink & Chemicals, Inc.	Disc bonding method and device therefor
EP0935243A3 (fr) *	1995-08-15	1999-12-08	Dainippon Ink And Chemicals, Inc.	Methode et dispositif pour coller des disques
US6334925B1 (en)	1995-08-15	2002-01-01	Dainippon Ink & Chemical, Inc.	Disc bonding method

Also Published As

Publication number	Publication date
JPS6229785B2 (fr)	1987-06-29

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