JPS5687347A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5687347A
JPS5687347A JP16507879A JP16507879A JPS5687347A JP S5687347 A JPS5687347 A JP S5687347A JP 16507879 A JP16507879 A JP 16507879A JP 16507879 A JP16507879 A JP 16507879A JP S5687347 A JPS5687347 A JP S5687347A
Authority
JP
Japan
Prior art keywords
pads
region
type
under
breaking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16507879A
Other languages
Japanese (ja)
Other versions
JPS6234148B2 (en
Inventor
Kazutoshi Nagano
Kosei Kajiwara
Tatsunori Nakajima
Kosuke Yasuno
Seiji Onaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP16507879A priority Critical patent/JPS5687347A/en
Publication of JPS5687347A publication Critical patent/JPS5687347A/en
Publication of JPS6234148B2 publication Critical patent/JPS6234148B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/482—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes for individual devices provided for in groups H10D8/00 - H10D48/00, e.g. for power transistors
    • H10W20/484—Interconnections having extended contours, e.g. pads having mesh shape or interconnections comprising connected parallel stripes

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To reduce the floating capacity and to prevent the breaking of wire of the semiconductor device by a method wherein a semiconductor element is provided in an island region being separated by a P-N junction, the electrode wiring and pads are provided surrounding the island region putting an insulating film therebetween, and insulating films under the pads are formed to be thicker by burying. CONSTITUTION:For example, the N type island region 31 is provided being separated by the P-N junction between a P type substrate 41 and a P<+> type diffusion layer 32, and a P type diffusion gate region 36, an N<+> type source region 34 and a drain region 35 are formed to provide the J FET. The insulating film 33 are formed selectively by burying under the bonding pads 39, 40 of the source and drain. Accordingly the floating capacity generated by the bonding pads can be reduced, and the breaking of the electrode wiring can be eliminated. At this case, the insulating layer under the pads can be formed in a short time on account of the change in quality from the porous layer.
JP16507879A 1979-12-18 1979-12-18 Semiconductor device Granted JPS5687347A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16507879A JPS5687347A (en) 1979-12-18 1979-12-18 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16507879A JPS5687347A (en) 1979-12-18 1979-12-18 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5687347A true JPS5687347A (en) 1981-07-15
JPS6234148B2 JPS6234148B2 (en) 1987-07-24

Family

ID=15805445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16507879A Granted JPS5687347A (en) 1979-12-18 1979-12-18 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5687347A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142845U (en) * 1987-03-12 1988-09-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142845U (en) * 1987-03-12 1988-09-20

Also Published As

Publication number Publication date
JPS6234148B2 (en) 1987-07-24

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