JPS57160123A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS57160123A
JPS57160123A JP56045553A JP4555381A JPS57160123A JP S57160123 A JPS57160123 A JP S57160123A JP 56045553 A JP56045553 A JP 56045553A JP 4555381 A JP4555381 A JP 4555381A JP S57160123 A JPS57160123 A JP S57160123A
Authority
JP
Japan
Prior art keywords
particle
vicinity
crystal
contained
silicon film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56045553A
Other languages
English (en)
Other versions
JPH0363208B2 (ja
Inventor
Yoshifumi Katayama
Juichi Shimada
Eiichi Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56045553A priority Critical patent/JPS57160123A/ja
Priority to DE8282301643T priority patent/DE3278527D1/de
Priority to CA000399652A priority patent/CA1189940A/en
Priority to EP82301643A priority patent/EP0061923B1/en
Priority to KR8201382A priority patent/KR860001161B1/ko
Publication of JPS57160123A publication Critical patent/JPS57160123A/ja
Priority to US06/710,953 priority patent/US4613382A/en
Publication of JPH0363208B2 publication Critical patent/JPH0363208B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901—Materials
    • H10P14/2921—Materials being crystalline insulating materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H10D30/6745—Polycrystalline or microcrystalline silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40—Crystalline structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/834—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge further characterised by the dopants
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/162—Non-monocrystalline materials, e.g. semiconductor particles embedded in insulating materials
    • H10F77/164—Polycrystalline semiconductors
    • H10F77/1642—Polycrystalline semiconductors including only Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/22—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using physical deposition, e.g. vacuum deposition or sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901—Materials
    • H10P14/2923—Materials being conductive materials, e.g. metallic silicides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/32—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
    • H10P14/3202—Materials thereof
    • H10P14/3204—Materials thereof being Group IVA semiconducting materials
    • H10P14/3211—Silicon, silicon germanium or germanium
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3404—Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
    • H10P14/3411—Silicon, silicon germanium or germanium
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3438—Doping during depositing
    • H10P14/3441—Conductivity type
    • H10P14/3442—N-type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3438—Doping during depositing
    • H10P14/3441—Conductivity type
    • H10P14/3444—P-type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/546—Polycrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/958—Passivation layer

Landscapes

  • Thin Film Transistor (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Recrystallisation Techniques (AREA)
JP56045553A 1981-03-30 1981-03-30 Semiconductor device Granted JPS57160123A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP56045553A JPS57160123A (en) 1981-03-30 1981-03-30 Semiconductor device
DE8282301643T DE3278527D1 (en) 1981-03-30 1982-03-29 Semiconductor device having a polycrystalline thin film
CA000399652A CA1189940A (en) 1981-03-30 1982-03-29 Semiconductor device
EP82301643A EP0061923B1 (en) 1981-03-30 1982-03-29 Semiconductor device having a polycrystalline thin film
KR8201382A KR860001161B1 (ko) 1981-03-30 1982-03-30 반도체 장치
US06/710,953 US4613382A (en) 1981-03-30 1985-03-14 Method of forming passivated polycrystalline semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56045553A JPS57160123A (en) 1981-03-30 1981-03-30 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57160123A true JPS57160123A (en) 1982-10-02
JPH0363208B2 JPH0363208B2 (ja) 1991-09-30

Family

ID=12722546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56045553A Granted JPS57160123A (en) 1981-03-30 1981-03-30 Semiconductor device

Country Status (6)

Country Link
US (1) US4613382A (ja)
EP (1) EP0061923B1 (ja)
JP (1) JPS57160123A (ja)
KR (1) KR860001161B1 (ja)
CA (1) CA1189940A (ja)
DE (1) DE3278527D1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60254661A (ja) * 1984-05-14 1985-12-16 エナージー・コンバーシヨン・デバイセス・インコーポレーテツド 集積回路と両立可能な改良された薄膜電界効果トランジスタとその製造方法
JPH0323639A (ja) * 1989-06-21 1991-01-31 Sony Corp 薄膜トランジスタ

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3241959A1 (de) * 1981-11-13 1983-05-26 Canon K.K., Tokyo Halbleiterbauelement
DE3300400A1 (de) * 1982-01-06 1983-07-14 Canon K.K., Tokyo Halbleiterbauelement
DE3465831D1 (de) * 1983-06-17 1987-10-08 Texas Instruments Inc Polysilicon fets
US5111260A (en) * 1983-06-17 1992-05-05 Texax Instruments Incorporated Polysilicon FETs
US4727044A (en) * 1984-05-18 1988-02-23 Semiconductor Energy Laboratory Co., Ltd. Method of making a thin film transistor with laser recrystallized source and drain
US4717681A (en) * 1986-05-19 1988-01-05 Texas Instruments Incorporated Method of making a heterojunction bipolar transistor with SIPOS
US4821091A (en) * 1986-07-22 1989-04-11 The United States Of America As Represented By The United States Department Of Energy Polysilicon photoconductor for integrated circuits
US4945065A (en) * 1988-06-02 1990-07-31 Mobil Solar Energy Corporation Method of passivating crystalline substrates
JPH0388321A (ja) * 1989-08-31 1991-04-12 Tonen Corp 多結晶シリコン薄膜
US5051786A (en) * 1989-10-24 1991-09-24 Mcnc Passivated polycrystalline semiconductors quantum well/superlattice structures fabricated thereof
JPH0828379B2 (ja) * 1990-05-28 1996-03-21 株式会社東芝 半導体装置の製造方法
EP0459763B1 (en) * 1990-05-29 1997-05-02 Semiconductor Energy Laboratory Co., Ltd. Thin-film transistors
JPH0611705A (ja) * 1992-01-31 1994-01-21 Sony Corp 能動素子基板
JPH06151801A (ja) * 1992-11-13 1994-05-31 Canon Inc 光電変換装置及び光電変換装置の製造方法
US5897346A (en) * 1994-02-28 1999-04-27 Semiconductor Energy Laboratory Co., Ltd. Method for producing a thin film transistor
US5620906A (en) * 1994-02-28 1997-04-15 Semiconductor Energy Laboratory Co., Ltd. Method for producing semiconductor device by introducing hydrogen ions
KR100295718B1 (ko) * 1995-06-06 2001-09-03 아사히 가세이 마이크로시스템 가부시끼가이샤 반도체장치및그의제조방법
JPH09148581A (ja) * 1995-11-17 1997-06-06 Sharp Corp 薄膜半導体装置の製造方法
US5665611A (en) 1996-01-31 1997-09-09 Micron Technology, Inc. Method of forming a thin film transistor using fluorine passivation
TW322591B (ja) * 1996-02-09 1997-12-11 Handotai Energy Kenkyusho Kk
US6936485B2 (en) * 2000-03-27 2005-08-30 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a light emitting device
DE102005013537A1 (de) * 2004-03-24 2005-10-20 Sharp Kk Fotoelektrischer Wandler und Herstellverfahren für einen solchen
MX2010007723A (es) * 2008-01-15 2010-08-09 First Solar Inc Dispositivos fotovoltaicos tratados con plasma.
US9299863B2 (en) * 2008-05-07 2016-03-29 The Hong Kong University Of Science And Technology Ultrathin film multi-crystalline photovoltaic device
US20120006395A1 (en) * 2010-07-08 2012-01-12 E. I. Du Pont De Nemours And Company Coated stainless steel substrate
JP2012019146A (ja) * 2010-07-09 2012-01-26 Sony Corp 撮像装置、表示撮像装置および電子機器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55151374A (en) * 1979-05-14 1980-11-25 Shunpei Yamazaki Semiconductor device
JPS55151329A (en) * 1979-05-14 1980-11-25 Shunpei Yamazaki Fabricating method of semiconductor device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4196438A (en) * 1976-09-29 1980-04-01 Rca Corporation Article and device having an amorphous silicon containing a halogen and method of fabrication
US4217374A (en) * 1978-03-08 1980-08-12 Energy Conversion Devices, Inc. Amorphous semiconductors equivalent to crystalline semiconductors
US4342044A (en) * 1978-03-08 1982-07-27 Energy Conversion Devices, Inc. Method for optimizing photoresponsive amorphous alloys and devices
US4178415A (en) * 1978-03-22 1979-12-11 Energy Conversion Devices, Inc. Modified amorphous semiconductors and method of making the same
US4239554A (en) * 1978-07-17 1980-12-16 Shunpei Yamazaki Semiconductor photoelectric conversion device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55151374A (en) * 1979-05-14 1980-11-25 Shunpei Yamazaki Semiconductor device
JPS55151329A (en) * 1979-05-14 1980-11-25 Shunpei Yamazaki Fabricating method of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60254661A (ja) * 1984-05-14 1985-12-16 エナージー・コンバーシヨン・デバイセス・インコーポレーテツド 集積回路と両立可能な改良された薄膜電界効果トランジスタとその製造方法
JPS60254660A (ja) * 1984-05-14 1985-12-16 エナージー・コンバーシヨン・デバイセス・インコーポレーテツド 薄膜電界効果トランジスタとその作製方法
JPH0323639A (ja) * 1989-06-21 1991-01-31 Sony Corp 薄膜トランジスタ

Also Published As

Publication number Publication date
CA1189940A (en) 1985-07-02
US4613382A (en) 1986-09-23
JPH0363208B2 (ja) 1991-09-30
EP0061923B1 (en) 1988-05-18
EP0061923A1 (en) 1982-10-06
KR830009646A (ko) 1983-12-22
KR860001161B1 (ko) 1986-08-18
DE3278527D1 (en) 1988-06-23

Similar Documents

Publication Publication Date Title
JPS57160123A (en) Semiconductor device
ES8501677A1 (es) Procedimiento y aparato para procesar una pluralidad de dispositivos sensibles a la radiacion expuestos a modo de imagen
JPS5779663A (en) Semiconductor device
JPS5222565A (en) Reducing material feeding device
JPS5365659A (en) Semiconductor heat diffusion device
JPS538073A (en) Mis type semiconductor device
JPS54162451A (en) Heat treatment method of compound semiconductor and its heat treatment unit
JPS5512792A (en) Voltage reference diode
JPS52137275A (en) Separation of semiconductor elements
JPS52131453A (en) Thermal treating method for chemical compound semiconductor
JPS5378165A (en) Cutting method for semiconductor substrate
JPS5383000A (en) Deconramination cooling prosess and the device thereof for reactor
JPS5336719A (en) Overflow preventing device for liquid feeding apparatus
JPS52101394A (en) Coolant feeding system for reactor
JPS5240967A (en) Method of diffusing impurities in compund semiconductor
JPS5281065A (en) Regulation for liquid concentration apparatus
JPS5354989A (en) Semiconductor device
JPS5295381A (en) Bearing device
JPS5292097A (en) Limiter of plasma enclosing apparatus using heat-decomposing graphite
JPS52111698A (en) Semiconductor porcelain element
JPS5493963A (en) Semiconductor device
JPS52155050A (en) Production of semiconductor device
JPS5212559A (en) Exposure of electronic microscope
JPS57117234A (en) Manufacture of semiconductor device
JPS5692194A (en) Crucible for growing compound semiconductor single crystal