JPS5719931A - Electrode forming method for face discharge type gas discharge panel - Google Patents

Electrode forming method for face discharge type gas discharge panel

Info

Publication number
JPS5719931A
JPS5719931A JP9488980A JP9488980A JPS5719931A JP S5719931 A JPS5719931 A JP S5719931A JP 9488980 A JP9488980 A JP 9488980A JP 9488980 A JP9488980 A JP 9488980A JP S5719931 A JPS5719931 A JP S5719931A
Authority
JP
Japan
Prior art keywords
electrode
layer
forming method
type gas
electrode forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9488980A
Other languages
Japanese (ja)
Inventor
Yoshinori Miyashita
Hiroshi Shinoda
Yoshimi Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9488980A priority Critical patent/JPS5719931A/en
Publication of JPS5719931A publication Critical patent/JPS5719931A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)

Abstract

PURPOSE:To improve the indication quality and the manufacture yield of a panel, when forming the second layer electrode of predetermined pattern, by utilizing the convex/concave corresponding with the first layer electrode pattern as the reference for mask matching. CONSTITUTION:A conductive layer composed of parallel Y-direction stripe electrode Y, first film insulator layer 2 and second layer electrode is formed on a glass substrate 1. A photoresist layer 11, and a photomask 12 are formed on the surface of the conductive layer 10. Here the positional matching of the photomask 12 is performed with reference to the convex/concave of the conductive layer 10. Thereafter the exposure and the etching are performed to form an electrode chip 4 coupled to a floating electrode 3 and X-directional electrode.
JP9488980A 1980-07-10 1980-07-10 Electrode forming method for face discharge type gas discharge panel Pending JPS5719931A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9488980A JPS5719931A (en) 1980-07-10 1980-07-10 Electrode forming method for face discharge type gas discharge panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9488980A JPS5719931A (en) 1980-07-10 1980-07-10 Electrode forming method for face discharge type gas discharge panel

Publications (1)

Publication Number Publication Date
JPS5719931A true JPS5719931A (en) 1982-02-02

Family

ID=14122603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9488980A Pending JPS5719931A (en) 1980-07-10 1980-07-10 Electrode forming method for face discharge type gas discharge panel

Country Status (1)

Country Link
JP (1) JPS5719931A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02211816A (en) * 1989-02-13 1990-08-23 Nippon Steel Corp Fishing reef made of iron oxide composite concrete

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02211816A (en) * 1989-02-13 1990-08-23 Nippon Steel Corp Fishing reef made of iron oxide composite concrete

Similar Documents

Publication Publication Date Title
JPS56168654A (en) Photomask
JPS5797626A (en) Manufacture of semiconductor device
JPS5528077A (en) Production of mask
JPS6488546A (en) Method for exposing thick film resist
JPS57155539A (en) Mask
JPS5799738A (en) Charged beam exposure method
JPS56158334A (en) Manufacture of hard mask
JPS56125743A (en) Base material for photomask
JPS5689741A (en) Dryplate for photomasking
JPS5743425A (en) Forming method for fine pattern
JPS5699342A (en) Manufacture of photomask
JPS5732635A (en) Production of semiconductor device
JPS56165244A (en) Manufacture of multilayer thin film electrode
JPS5719932A (en) Electrode forming method for face discharge type gas discharge panel
JPS5555528A (en) Mask aligner
JPS5778026A (en) Production of optical display panel
JPS56123376A (en) Etching method
JPS5637629A (en) Formation of thin film pattern
JPS57112025A (en) Formation of pattern
JPS56157032A (en) Manufacture of element having minute pattern
JPS57118641A (en) Lifting-off method
JPS56107554A (en) Formation of pattern
JPS5745261A (en) Forming method for pattern
JPS55132038A (en) Forming method for metallic electrode on semiconductor substrate
JPS5740833A (en) Production of surface discharge type gas discharge panel