JPS574141A - Wiring structure in semiconductor device - Google Patents
Wiring structure in semiconductor deviceInfo
- Publication number
- JPS574141A JPS574141A JP7849280A JP7849280A JPS574141A JP S574141 A JPS574141 A JP S574141A JP 7849280 A JP7849280 A JP 7849280A JP 7849280 A JP7849280 A JP 7849280A JP S574141 A JPS574141 A JP S574141A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layers
- metal
- wiring
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 239000010410 layer Substances 0.000 abstract 9
- 239000002184 metal Substances 0.000 abstract 5
- 230000003647 oxidation Effects 0.000 abstract 3
- 238000007254 oxidation reaction Methods 0.000 abstract 3
- 239000011229 interlayer Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7849280A JPS574141A (en) | 1980-06-10 | 1980-06-10 | Wiring structure in semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7849280A JPS574141A (en) | 1980-06-10 | 1980-06-10 | Wiring structure in semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS574141A true JPS574141A (en) | 1982-01-09 |
Family
ID=13663467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7849280A Pending JPS574141A (en) | 1980-06-10 | 1980-06-10 | Wiring structure in semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS574141A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4994402A (en) * | 1987-06-26 | 1991-02-19 | Hewlett-Packard Company | Method of fabricating a coplanar, self-aligned contact structure in a semiconductor device |
-
1980
- 1980-06-10 JP JP7849280A patent/JPS574141A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4994402A (en) * | 1987-06-26 | 1991-02-19 | Hewlett-Packard Company | Method of fabricating a coplanar, self-aligned contact structure in a semiconductor device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR960002804A (ko) | 반도체장치 및 그 제조방법 | |
| KR920022372A (ko) | 게이트와 드레인이 중첩된 모오스 트랜지스터의 제조방법 및 그 구조 | |
| JPS6414969A (en) | Light-shielding type uprom | |
| JPS6417473A (en) | Manufacture of semiconductor device | |
| JPS574141A (en) | Wiring structure in semiconductor device | |
| JPS5787145A (en) | Semiconductor device | |
| JPS56162873A (en) | Insulated gate type field effect semiconductor device | |
| JPS6420640A (en) | Semiconductor device and manufacture thereof | |
| JPS6445147A (en) | Semiconductor device | |
| JPS5750449A (en) | Semiconductor device and manufacture therefor | |
| JPS57106153A (en) | Semiconductor device | |
| JPS6457671A (en) | Semiconductor device and manufacture thereof | |
| JPS57102049A (en) | Formation of multilayer wiring | |
| JPS6437058A (en) | Insulated-gate field-effect transistor | |
| JPS5552262A (en) | Mos semiconductor device | |
| JPS5323564A (en) | Bump type semiconductor device | |
| JPS6421965A (en) | Mos transistor | |
| JPS5289476A (en) | Semiconductor device | |
| JPS56161655A (en) | Multilayer aluminum wiring for semiconductor device | |
| JPS5736865A (en) | Semiconductor device | |
| KR960026155A (ko) | 반도체장치의 접촉창 형성방법 | |
| JPS57211767A (en) | Mos integrated circuit | |
| JPS5789253A (en) | Semiconductor device | |
| JPS5649542A (en) | Integrated circuit device of mos type | |
| JPS60214569A (ja) | Ｍｏｓ型半導体装置 |