JPS58161320A - 規則性パタ−ンの欠陥検査装置 - Google Patents

規則性パタ−ンの欠陥検査装置

Info

Publication number
JPS58161320A
JPS58161320A JP57042541A JP4254182A JPS58161320A JP S58161320 A JPS58161320 A JP S58161320A JP 57042541 A JP57042541 A JP 57042541A JP 4254182 A JP4254182 A JP 4254182A JP S58161320 A JPS58161320 A JP S58161320A
Authority
JP
Japan
Prior art keywords
defect
pattern
signal
movement
edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57042541A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0211841B2 (mo
Inventor
Nobuo Tsumita
積田　伸夫
Shunsuke Mukasa
武笠　俊介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP57042541A priority Critical patent/JPS58161320A/ja
Publication of JPS58161320A publication Critical patent/JPS58161320A/ja
Publication of JPH0211841B2 publication Critical patent/JPH0211841B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57042541A 1982-03-19 1982-03-19 規則性パタ−ンの欠陥検査装置 Granted JPS58161320A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57042541A JPS58161320A (ja) 1982-03-19 1982-03-19 規則性パタ−ンの欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57042541A JPS58161320A (ja) 1982-03-19 1982-03-19 規則性パタ−ンの欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS58161320A true JPS58161320A (ja) 1983-09-24
JPH0211841B2 JPH0211841B2 (mo) 1990-03-16

Family

ID=12638920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57042541A Granted JPS58161320A (ja) 1982-03-19 1982-03-19 規則性パタ−ンの欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS58161320A (mo)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06212629A (ja) * 1991-08-30 1994-08-02 Samsung Construction Co Ltd 地中アンカーとロックボルトの施工方法及びその組立体

Also Published As

Publication number Publication date
JPH0211841B2 (mo) 1990-03-16

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