JPS58169788A - 真空用試料加熱装置 - Google Patents

真空用試料加熱装置

Info

Publication number
JPS58169788A
JPS58169788A JP5199982A JP5199982A JPS58169788A JP S58169788 A JPS58169788 A JP S58169788A JP 5199982 A JP5199982 A JP 5199982A JP 5199982 A JP5199982 A JP 5199982A JP S58169788 A JPS58169788 A JP S58169788A
Authority
JP
Japan
Prior art keywords
vacuum
heater
sample
ceramic plate
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5199982A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413837B2 (2
Inventor
多禾夫 太田
見方　裕一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP5199982A priority Critical patent/JPS58169788A/ja
Publication of JPS58169788A publication Critical patent/JPS58169788A/ja
Publication of JPH0413837B2 publication Critical patent/JPH0413837B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP5199982A 1982-03-30 1982-03-30 真空用試料加熱装置 Granted JPS58169788A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5199982A JPS58169788A (ja) 1982-03-30 1982-03-30 真空用試料加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5199982A JPS58169788A (ja) 1982-03-30 1982-03-30 真空用試料加熱装置

Publications (2)

Publication Number Publication Date
JPS58169788A true JPS58169788A (ja) 1983-10-06
JPH0413837B2 JPH0413837B2 (2) 1992-03-10

Family

ID=12902537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5199982A Granted JPS58169788A (ja) 1982-03-30 1982-03-30 真空用試料加熱装置

Country Status (1)

Country Link
JP (1) JPS58169788A (2)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140085A (ja) * 1986-11-29 1988-06-11 Kyocera Corp 成膜装置
JPH04101381A (ja) * 1990-08-17 1992-04-02 Ngk Insulators Ltd 半導体ウエハー加熱装置
JPH05101871A (ja) * 1991-10-09 1993-04-23 Ngk Insulators Ltd セラミツクスヒーター
US5306895A (en) * 1991-03-26 1994-04-26 Ngk Insulators, Ltd. Corrosion-resistant member for chemical apparatus using halogen series corrosive gas

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254940U (2) * 1975-10-20 1977-04-20
JPS57870A (en) * 1980-06-04 1982-01-05 Matsushita Electric Industrial Co Ltd Ceramic heater
JPS5737436U (2) * 1980-08-13 1982-02-27

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254940U (2) * 1975-10-20 1977-04-20
JPS57870A (en) * 1980-06-04 1982-01-05 Matsushita Electric Industrial Co Ltd Ceramic heater
JPS5737436U (2) * 1980-08-13 1982-02-27

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140085A (ja) * 1986-11-29 1988-06-11 Kyocera Corp 成膜装置
JPH04101381A (ja) * 1990-08-17 1992-04-02 Ngk Insulators Ltd 半導体ウエハー加熱装置
US5306895A (en) * 1991-03-26 1994-04-26 Ngk Insulators, Ltd. Corrosion-resistant member for chemical apparatus using halogen series corrosive gas
JPH05101871A (ja) * 1991-10-09 1993-04-23 Ngk Insulators Ltd セラミツクスヒーター

Also Published As

Publication number Publication date
JPH0413837B2 (2) 1992-03-10

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