JPS59105804A - 半導体用反応性気体精製方法 - Google Patents

半導体用反応性気体精製方法

Info

Publication number
JPS59105804A
JPS59105804A JP57217570A JP21757082A JPS59105804A JP S59105804 A JPS59105804 A JP S59105804A JP 57217570 A JP57217570 A JP 57217570A JP 21757082 A JP21757082 A JP 21757082A JP S59105804 A JPS59105804 A JP S59105804A
Authority
JP
Japan
Prior art keywords
reactive gas
container
silane
gas
semiconductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57217570A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6328645B2 (cs
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP57217570A priority Critical patent/JPS59105804A/ja
Publication of JPS59105804A publication Critical patent/JPS59105804A/ja
Publication of JPS6328645B2 publication Critical patent/JPS6328645B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Silicon Compounds (AREA)
  • Photovoltaic Devices (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP57217570A 1982-12-11 1982-12-11 半導体用反応性気体精製方法 Granted JPS59105804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57217570A JPS59105804A (ja) 1982-12-11 1982-12-11 半導体用反応性気体精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57217570A JPS59105804A (ja) 1982-12-11 1982-12-11 半導体用反応性気体精製方法

Publications (2)

Publication Number Publication Date
JPS59105804A true JPS59105804A (ja) 1984-06-19
JPS6328645B2 JPS6328645B2 (cs) 1988-06-09

Family

ID=16706334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57217570A Granted JPS59105804A (ja) 1982-12-11 1982-12-11 半導体用反応性気体精製方法

Country Status (1)

Country Link
JP (1) JPS59105804A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162119A (ja) * 1983-03-03 1984-09-13 Semiconductor Energy Lab Co Ltd 気相反応用シラン精製方法
CN102628546A (zh) * 2012-04-17 2012-08-08 南京特种气体厂有限公司 硅烷纯化与灌装用冷阱系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122904A (en) * 1981-01-23 1982-07-31 Toshiba Corp Removal of accumulated substance in cold trap apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122904A (en) * 1981-01-23 1982-07-31 Toshiba Corp Removal of accumulated substance in cold trap apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59162119A (ja) * 1983-03-03 1984-09-13 Semiconductor Energy Lab Co Ltd 気相反応用シラン精製方法
CN102628546A (zh) * 2012-04-17 2012-08-08 南京特种气体厂有限公司 硅烷纯化与灌装用冷阱系统

Also Published As

Publication number Publication date
JPS6328645B2 (cs) 1988-06-09

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