JPS59169519A - 感光性樹脂溶液の濾過分離法 - Google Patents

感光性樹脂溶液の濾過分離法

Info

Publication number
JPS59169519A
JPS59169519A JP58044468A JP4446883A JPS59169519A JP S59169519 A JPS59169519 A JP S59169519A JP 58044468 A JP58044468 A JP 58044468A JP 4446883 A JP4446883 A JP 4446883A JP S59169519 A JPS59169519 A JP S59169519A
Authority
JP
Japan
Prior art keywords
resin
photosensitive resin
solution
sheet
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58044468A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0131408B2 (cs
Inventor
Kiyoshi Tamura
清 田村
Kenji Murayama
村山　健治
Tokuo Fujita
藤田　徳雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP58044468A priority Critical patent/JPS59169519A/ja
Publication of JPS59169519A publication Critical patent/JPS59169519A/ja
Publication of JPH0131408B2 publication Critical patent/JPH0131408B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Filtration Of Liquid (AREA)
JP58044468A 1983-03-18 1983-03-18 感光性樹脂溶液の濾過分離法 Granted JPS59169519A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58044468A JPS59169519A (ja) 1983-03-18 1983-03-18 感光性樹脂溶液の濾過分離法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58044468A JPS59169519A (ja) 1983-03-18 1983-03-18 感光性樹脂溶液の濾過分離法

Publications (2)

Publication Number Publication Date
JPS59169519A true JPS59169519A (ja) 1984-09-25
JPH0131408B2 JPH0131408B2 (cs) 1989-06-26

Family

ID=12692330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58044468A Granted JPS59169519A (ja) 1983-03-18 1983-03-18 感光性樹脂溶液の濾過分離法

Country Status (1)

Country Link
JP (1) JPS59169519A (cs)

Also Published As

Publication number Publication date
JPH0131408B2 (cs) 1989-06-26

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