JPS59228752A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS59228752A
JPS59228752A JP58104524A JP10452483A JPS59228752A JP S59228752 A JPS59228752 A JP S59228752A JP 58104524 A JP58104524 A JP 58104524A JP 10452483 A JP10452483 A JP 10452483A JP S59228752 A JPS59228752 A JP S59228752A
Authority
JP
Japan
Prior art keywords
film
capacitor
substrate
electrode
polysilicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58104524A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6347354B2 (2
Inventor
Seiichiro Otake
精一郎 大竹
Tetsuo Fujii
哲夫 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP58104524A priority Critical patent/JPS59228752A/ja
Publication of JPS59228752A publication Critical patent/JPS59228752A/ja
Publication of JPS6347354B2 publication Critical patent/JPS6347354B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Formation Of Insulating Films (AREA)
JP58104524A 1983-06-10 1983-06-10 半導体装置 Granted JPS59228752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58104524A JPS59228752A (ja) 1983-06-10 1983-06-10 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58104524A JPS59228752A (ja) 1983-06-10 1983-06-10 半導体装置

Publications (2)

Publication Number Publication Date
JPS59228752A true JPS59228752A (ja) 1984-12-22
JPS6347354B2 JPS6347354B2 (2) 1988-09-21

Family

ID=14382876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58104524A Granted JPS59228752A (ja) 1983-06-10 1983-06-10 半導体装置

Country Status (1)

Country Link
JP (1) JPS59228752A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4997794A (en) * 1987-06-11 1991-03-05 U.S. Philips Corporation Method of making semiconductor device comprising a capacitor and a buried passivation layer
JPH03159166A (ja) * 1989-11-08 1991-07-09 Samsung Electron Co Ltd 半導体装置及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4997794A (en) * 1987-06-11 1991-03-05 U.S. Philips Corporation Method of making semiconductor device comprising a capacitor and a buried passivation layer
JPH03159166A (ja) * 1989-11-08 1991-07-09 Samsung Electron Co Ltd 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPS6347354B2 (2) 1988-09-21

Similar Documents

Publication Publication Date Title
US5420449A (en) Capacitor for a semiconductor device
JPH0260163A (ja) 半導体メモリの製造方法
US4921816A (en) Method of making a trench dram
JPH01146354A (ja) 半導体記憶装置
JPS59228752A (ja) 半導体装置
US6373083B1 (en) Capacitor for semiconductor device and fabrication method thereof
JPH0823079A (ja) 半導体集積回路装置およびその製造方法
JPH065713B2 (ja) 半導体集積回路装置
JPH0321062A (ja) 半導体記憶装置
JPH0379072A (ja) 半導体記憶装置及びその製造方法
JPS596068B2 (ja) 半導体メモリ装置
JPS6358959A (ja) キヤパシタを有する電界効果型半導体装置
JP2826239B2 (ja) コンデンサ
JPH0281470A (ja) 半導体装置の製造方法
JPH04124835A (ja) 半導体装置及びその製造方法
JPS6110271A (ja) 半導体装置
JPH0223646A (ja) 半導体装置
JPH06291276A (ja) 半導体メモリ及びその製造方法
JPH0529574A (ja) 半導体装置の製造方法
JPH04164364A (ja) 半導体装置
JP2827377B2 (ja) 半導体集積回路
JPH03276680A (ja) 半導体装置およびその製造方法
JPS59210663A (ja) 半導体メモリ装置
JPS6190455A (ja) キヤパシタ
JPS6085555A (ja) 半導体装置の製造方法