JPS5972155A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5972155A
JPS5972155A JP18435482A JP18435482A JPS5972155A JP S5972155 A JPS5972155 A JP S5972155A JP 18435482 A JP18435482 A JP 18435482A JP 18435482 A JP18435482 A JP 18435482A JP S5972155 A JPS5972155 A JP S5972155A
Authority
JP
Japan
Prior art keywords
electrode
cells
films
electrodes
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18435482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342413B2 (2
Inventor
Akihisa Taniguchi
谷口　明久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP18435482A priority Critical patent/JPS5972155A/ja
Publication of JPS5972155A publication Critical patent/JPS5972155A/ja
Publication of JPS6342413B2 publication Critical patent/JPS6342413B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)
JP18435482A 1982-10-18 1982-10-18 半導体装置の製造方法 Granted JPS5972155A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18435482A JPS5972155A (ja) 1982-10-18 1982-10-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18435482A JPS5972155A (ja) 1982-10-18 1982-10-18 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5972155A true JPS5972155A (ja) 1984-04-24
JPS6342413B2 JPS6342413B2 (2) 1988-08-23

Family

ID=16151779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18435482A Granted JPS5972155A (ja) 1982-10-18 1982-10-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5972155A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0442407U (2) * 1990-08-10 1992-04-10

Also Published As

Publication number Publication date
JPS6342413B2 (2) 1988-08-23

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