JPS5984548A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5984548A
JPS5984548A JP19458082A JP19458082A JPS5984548A JP S5984548 A JPS5984548 A JP S5984548A JP 19458082 A JP19458082 A JP 19458082A JP 19458082 A JP19458082 A JP 19458082A JP S5984548 A JPS5984548 A JP S5984548A
Authority
JP
Japan
Prior art keywords
silicon
film
deposited
substrate
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19458082A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0586655B2 (it
Inventor
Susumu Muramoto
村本　進
Takashi Morimoto
孝 森本
Katsuyuki Machida
克之 町田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP19458082A priority Critical patent/JPS5984548A/ja
Publication of JPS5984548A publication Critical patent/JPS5984548A/ja
Publication of JPH0586655B2 publication Critical patent/JPH0586655B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP19458082A 1982-11-08 1982-11-08 半導体装置の製造方法 Granted JPS5984548A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19458082A JPS5984548A (ja) 1982-11-08 1982-11-08 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19458082A JPS5984548A (ja) 1982-11-08 1982-11-08 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5984548A true JPS5984548A (ja) 1984-05-16
JPH0586655B2 JPH0586655B2 (it) 1993-12-13

Family

ID=16326902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19458082A Granted JPS5984548A (ja) 1982-11-08 1982-11-08 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5984548A (it)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568075A (en) * 1978-11-17 1980-05-22 Charbonnages De France Automatic temperature control electric heating panel heater and method of manufacturing same
JPS5928358A (ja) * 1982-08-10 1984-02-15 Toshiba Corp 半導体装置の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568075A (en) * 1978-11-17 1980-05-22 Charbonnages De France Automatic temperature control electric heating panel heater and method of manufacturing same
JPS5928358A (ja) * 1982-08-10 1984-02-15 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0586655B2 (it) 1993-12-13

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