JPS60100451A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS60100451A
JPS60100451A JP58207556A JP20755683A JPS60100451A JP S60100451 A JPS60100451 A JP S60100451A JP 58207556 A JP58207556 A JP 58207556A JP 20755683 A JP20755683 A JP 20755683A JP S60100451 A JPS60100451 A JP S60100451A
Authority
JP
Japan
Prior art keywords
film
wiring
etching
insulating film
unnecessary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58207556A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220141B2 (th
Inventor
Takayuki Matsui
孝行 松井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP58207556A priority Critical patent/JPS60100451A/ja
Publication of JPS60100451A publication Critical patent/JPS60100451A/ja
Publication of JPH0220141B2 publication Critical patent/JPH0220141B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Drying Of Semiconductors (AREA)
JP58207556A 1983-11-07 1983-11-07 半導体装置の製造方法 Granted JPS60100451A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58207556A JPS60100451A (ja) 1983-11-07 1983-11-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58207556A JPS60100451A (ja) 1983-11-07 1983-11-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60100451A true JPS60100451A (ja) 1985-06-04
JPH0220141B2 JPH0220141B2 (th) 1990-05-08

Family

ID=16541688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58207556A Granted JPS60100451A (ja) 1983-11-07 1983-11-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60100451A (th)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267825A (ja) * 1985-09-20 1987-03-27 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ 半導体装置の表面を平坦化する方法
JPH029120A (ja) * 1988-06-28 1990-01-12 Tokuda Seisakusho Ltd 真空処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267825A (ja) * 1985-09-20 1987-03-27 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ 半導体装置の表面を平坦化する方法
JPH029120A (ja) * 1988-06-28 1990-01-12 Tokuda Seisakusho Ltd 真空処理装置

Also Published As

Publication number Publication date
JPH0220141B2 (th) 1990-05-08

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