JPS60210720A - クリ−ンル−ムの検査装置 - Google Patents

クリ−ンル−ムの検査装置

Info

Publication number
JPS60210720A
JPS60210720A JP59066647A JP6664784A JPS60210720A JP S60210720 A JPS60210720 A JP S60210720A JP 59066647 A JP59066647 A JP 59066647A JP 6664784 A JP6664784 A JP 6664784A JP S60210720 A JPS60210720 A JP S60210720A
Authority
JP
Japan
Prior art keywords
vehicle
probe
inspection
filter
computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59066647A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510605B2 (2
Inventor
Yasuo Inoue
康夫 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ohbayashi Gumi Ltd
Obayashi Gumi Ltd
Original Assignee
Ohbayashi Gumi Ltd
Obayashi Gumi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohbayashi Gumi Ltd, Obayashi Gumi Ltd filed Critical Ohbayashi Gumi Ltd
Priority to JP59066647A priority Critical patent/JPS60210720A/ja
Publication of JPS60210720A publication Critical patent/JPS60210720A/ja
Publication of JPH0510605B2 publication Critical patent/JPH0510605B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Navigation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Ventilation (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
JP59066647A 1984-04-05 1984-04-05 クリ−ンル−ムの検査装置 Granted JPS60210720A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59066647A JPS60210720A (ja) 1984-04-05 1984-04-05 クリ−ンル−ムの検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59066647A JPS60210720A (ja) 1984-04-05 1984-04-05 クリ−ンル−ムの検査装置

Publications (2)

Publication Number Publication Date
JPS60210720A true JPS60210720A (ja) 1985-10-23
JPH0510605B2 JPH0510605B2 (2) 1993-02-10

Family

ID=13321894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59066647A Granted JPS60210720A (ja) 1984-04-05 1984-04-05 クリ−ンル−ムの検査装置

Country Status (1)

Country Link
JP (1) JPS60210720A (2)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63158618A (ja) * 1986-09-29 1988-07-01 Daifuku Co Ltd クリ−ンル−ム用の移動車誘導設備
JPH01128540A (ja) * 1987-11-13 1989-05-22 Nec Corp ウェハー搬送車
JPH062199U (ja) * 1992-06-08 1994-01-14 新日本空調株式会社 クリーンルームにおける天井の漏洩検知装置
US7669490B2 (en) 2004-08-27 2010-03-02 Taikisha Ltd. Apparatus and method for testing filters in a clean room

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142499A (ja) * 1982-02-18 1983-08-24 株式会社東芝 移動式点検監視システム
JPS58186889U (ja) * 1982-06-08 1983-12-12 三菱電機株式会社 エア−シヤワ−室

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142499A (ja) * 1982-02-18 1983-08-24 株式会社東芝 移動式点検監視システム
JPS58186889U (ja) * 1982-06-08 1983-12-12 三菱電機株式会社 エア−シヤワ−室

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63158618A (ja) * 1986-09-29 1988-07-01 Daifuku Co Ltd クリ−ンル−ム用の移動車誘導設備
JPH01128540A (ja) * 1987-11-13 1989-05-22 Nec Corp ウェハー搬送車
JPH062199U (ja) * 1992-06-08 1994-01-14 新日本空調株式会社 クリーンルームにおける天井の漏洩検知装置
US7669490B2 (en) 2004-08-27 2010-03-02 Taikisha Ltd. Apparatus and method for testing filters in a clean room

Also Published As

Publication number Publication date
JPH0510605B2 (2) 1993-02-10

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