JPS60257148A - ウェーハ位置決め装置 - Google Patents

ウェーハ位置決め装置

Info

Publication number
JPS60257148A
JPS60257148A JP59112717A JP11271784A JPS60257148A JP S60257148 A JPS60257148 A JP S60257148A JP 59112717 A JP59112717 A JP 59112717A JP 11271784 A JP11271784 A JP 11271784A JP S60257148 A JPS60257148 A JP S60257148A
Authority
JP
Japan
Prior art keywords
wafer
light
positioning
semiconductor wafer
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59112717A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354859B2 (fr
Inventor
Toru Aoki
透 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Machinery Inc
Original Assignee
Nichiden Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nichiden Machinery Ltd filed Critical Nichiden Machinery Ltd
Priority to JP59112717A priority Critical patent/JPS60257148A/ja
Publication of JPS60257148A publication Critical patent/JPS60257148A/ja
Publication of JPH0354859B2 publication Critical patent/JPH0354859B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP59112717A 1984-05-31 1984-05-31 ウェーハ位置決め装置 Granted JPS60257148A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59112717A JPS60257148A (ja) 1984-05-31 1984-05-31 ウェーハ位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59112717A JPS60257148A (ja) 1984-05-31 1984-05-31 ウェーハ位置決め装置

Publications (2)

Publication Number Publication Date
JPS60257148A true JPS60257148A (ja) 1985-12-18
JPH0354859B2 JPH0354859B2 (fr) 1991-08-21

Family

ID=14593751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59112717A Granted JPS60257148A (ja) 1984-05-31 1984-05-31 ウェーハ位置決め装置

Country Status (1)

Country Link
JP (1) JPS60257148A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104084730A (zh) * 2014-04-02 2014-10-08 太原风华信息装备股份有限公司 太阳能电池片串焊机的电池片定位机构

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104084730A (zh) * 2014-04-02 2014-10-08 太原风华信息装备股份有限公司 太阳能电池片串焊机的电池片定位机构

Also Published As

Publication number Publication date
JPH0354859B2 (fr) 1991-08-21

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