JPS6031261Y2 - ガス置換装置 - Google Patents

ガス置換装置

Info

Publication number
JPS6031261Y2
JPS6031261Y2 JP4840779U JP4840779U JPS6031261Y2 JP S6031261 Y2 JPS6031261 Y2 JP S6031261Y2 JP 4840779 U JP4840779 U JP 4840779U JP 4840779 U JP4840779 U JP 4840779U JP S6031261 Y2 JPS6031261 Y2 JP S6031261Y2
Authority
JP
Japan
Prior art keywords
gas
opening
replacement
wafer
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4840779U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55147742U (2
Inventor
誠 平山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4840779U priority Critical patent/JPS6031261Y2/ja
Publication of JPS55147742U publication Critical patent/JPS55147742U/ja
Application granted granted Critical
Publication of JPS6031261Y2 publication Critical patent/JPS6031261Y2/ja
Expired legal-status Critical Current

Links

JP4840779U 1979-04-11 1979-04-11 ガス置換装置 Expired JPS6031261Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4840779U JPS6031261Y2 (ja) 1979-04-11 1979-04-11 ガス置換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4840779U JPS6031261Y2 (ja) 1979-04-11 1979-04-11 ガス置換装置

Publications (2)

Publication Number Publication Date
JPS55147742U JPS55147742U (2) 1980-10-23
JPS6031261Y2 true JPS6031261Y2 (ja) 1985-09-18

Family

ID=28932068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4840779U Expired JPS6031261Y2 (ja) 1979-04-11 1979-04-11 ガス置換装置

Country Status (1)

Country Link
JP (1) JPS6031261Y2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2549093Y2 (ja) * 1987-06-22 1997-09-24 東京エレクトロン株式会社 石英延長管

Also Published As

Publication number Publication date
JPS55147742U (2) 1980-10-23

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