JPS6141785A - 活性陰極の製造方法 - Google Patents

活性陰極の製造方法

Info

Publication number: JPS6141785A
Authority: JP; Japan
Prior art keywords: plating; particle size; size distribution; fine particles; nickel
Prior art date: 1984-08-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP59162852A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0245719B2 (mo

Inventor

Akihiro Sakata

昭博坂田

Toshimasa Okazaki

岡崎　利昌

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Toagosei Co Ltd

Original Assignee

Toagosei Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-08-03

Filing date

1984-08-03

Publication date

1986-02-28

1984-08-03 Application filed by Toagosei Co Ltd filed Critical Toagosei Co Ltd

1984-08-03 Priority to JP59162852A priority Critical patent/JPS6141785A/ja

1986-02-28 Publication of JPS6141785A publication Critical patent/JPS6141785A/ja

1990-10-11 Publication of JPH0245719B2 publication Critical patent/JPH0245719B2/ja

Status Granted legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title claims description 8
238000007747 plating Methods 0.000 claims abstract description 68
239000002245 particle Substances 0.000 claims abstract description 64
239000007787 solid Substances 0.000 claims abstract description 40
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 35
238000009826 distribution Methods 0.000 claims abstract description 29
229910052759 nickel Inorganic materials 0.000 claims abstract description 14
238000009713 electroplating Methods 0.000 claims abstract description 6
239000000758 substrate Substances 0.000 claims abstract description 4
239000010419 fine particle Substances 0.000 claims description 23
229910052751 metal Inorganic materials 0.000 claims description 10
239000002184 metal Substances 0.000 claims description 10
230000004913 activation Effects 0.000 claims 1
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 10
229910052739 hydrogen Inorganic materials 0.000 abstract description 10
239000001257 hydrogen Substances 0.000 abstract description 10
238000000151 deposition Methods 0.000 abstract description 3
239000006185 dispersion Substances 0.000 description 19
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 18
238000000034 method Methods 0.000 description 17
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
238000005406 washing Methods 0.000 description 12
239000000463 material Substances 0.000 description 10
238000005868 electrolysis reaction Methods 0.000 description 7
230000008569 process Effects 0.000 description 7
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
239000007769 metal material Substances 0.000 description 6
239000007868 Raney catalyst Substances 0.000 description 5
229910000564 Raney nickel Inorganic materials 0.000 description 5
239000000243 solution Substances 0.000 description 5
239000003513 alkali Substances 0.000 description 4
239000002585 base Substances 0.000 description 4
230000000694 effects Effects 0.000 description 4
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
229910021586 Nickel(II) chloride Inorganic materials 0.000 description 3
HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 3
230000008859 change Effects 0.000 description 3
KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
229910052802 copper Inorganic materials 0.000 description 3
239000010949 copper Substances 0.000 description 3
229910000365 copper sulfate Inorganic materials 0.000 description 3
ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 3
238000000866 electrolytic etching Methods 0.000 description 3
229910052742 iron Inorganic materials 0.000 description 3
239000007788 liquid Substances 0.000 description 3
QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 3
150000003839 salts Chemical class 0.000 description 3
229910052717 sulfur Inorganic materials 0.000 description 3
239000011593 sulfur Substances 0.000 description 3
NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 2
-1 alkali metal salts Chemical class 0.000 description 2
229910045601 alloy Inorganic materials 0.000 description 2
239000000956 alloy Substances 0.000 description 2
KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
239000004327 boric acid Substances 0.000 description 2
229910052799 carbon Inorganic materials 0.000 description 2
238000004140 cleaning Methods 0.000 description 2
239000011248 coating agent Substances 0.000 description 2
238000000576 coating method Methods 0.000 description 2
229910017052 cobalt Inorganic materials 0.000 description 2
239000010941 cobalt Substances 0.000 description 2
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
230000000052 comparative effect Effects 0.000 description 2
230000007797 corrosion Effects 0.000 description 2
238000005260 corrosion Methods 0.000 description 2
238000005516 engineering process Methods 0.000 description 2
LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 2
229910000363 nickel(II) sulfate Inorganic materials 0.000 description 2
239000000126 substance Substances 0.000 description 2
WWNBZGLDODTKEM-UHFFFAOYSA-N sulfanylidenenickel Chemical compound [Ni]=S WWNBZGLDODTKEM-UHFFFAOYSA-N 0.000 description 2
GGZZISOUXJHYOY-UHFFFAOYSA-N 8-amino-4-hydroxynaphthalene-2-sulfonic acid Chemical compound C1=C(S(O)(=O)=O)C=C2C(N)=CC=CC2=C1O GGZZISOUXJHYOY-UHFFFAOYSA-N 0.000 description 1
QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
230000002159 abnormal effect Effects 0.000 description 1
230000005856 abnormality Effects 0.000 description 1
230000009471 action Effects 0.000 description 1
238000007792 addition Methods 0.000 description 1
229910052783 alkali metal Inorganic materials 0.000 description 1
229910052784 alkaline earth metal Inorganic materials 0.000 description 1
150000001342 alkaline earth metals Chemical class 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
235000019270 ammonium chloride Nutrition 0.000 description 1
238000004458 analytical method Methods 0.000 description 1
239000007864 aqueous solution Substances 0.000 description 1
230000008901 benefit Effects 0.000 description 1
230000003197 catalytic effect Effects 0.000 description 1
230000008021 deposition Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000004134 energy conservation Methods 0.000 description 1
238000005530 etching Methods 0.000 description 1
238000004880 explosion Methods 0.000 description 1
238000007654 immersion Methods 0.000 description 1
230000005923 long-lasting effect Effects 0.000 description 1
239000002075 main ingredient Substances 0.000 description 1
238000005259 measurement Methods 0.000 description 1
239000000155 melt Substances 0.000 description 1
150000001247 metal acetylides Chemical class 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
239000000203 mixture Substances 0.000 description 1
229910052750 molybdenum Inorganic materials 0.000 description 1
239000011733 molybdenum Substances 0.000 description 1
CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
229910000476 molybdenum oxide Inorganic materials 0.000 description 1
LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
229910000480 nickel oxide Inorganic materials 0.000 description 1
150000004767 nitrides Chemical class 0.000 description 1
PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
SJLOMQIUPFZJAN-UHFFFAOYSA-N oxorhodium Chemical compound [Rh]=O SJLOMQIUPFZJAN-UHFFFAOYSA-N 0.000 description 1
RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
239000001103 potassium chloride Substances 0.000 description 1
235000011164 potassium chloride Nutrition 0.000 description 1
239000000843 powder Substances 0.000 description 1
238000003825 pressing Methods 0.000 description 1
238000010298 pulverizing process Methods 0.000 description 1
238000000197 pyrolysis Methods 0.000 description 1
230000009467 reduction Effects 0.000 description 1
229910003450 rhodium oxide Inorganic materials 0.000 description 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
229910010271 silicon carbide Inorganic materials 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
238000005507 spraying Methods 0.000 description 1
238000003756 stirring Methods 0.000 description 1
150000004763 sulfides Chemical class 0.000 description 1
239000004094 surface-active agent Substances 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1
UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1
229910001928 zirconium oxide Inorganic materials 0.000 description 1

Landscapes

Electrodes For Compound Or Non-Metal Manufacture (AREA)

JP59162852A 1984-08-03 1984-08-03 活性陰極の製造方法 Granted JPS6141785A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP59162852A JPS6141785A (ja)	1984-08-03	1984-08-03	活性陰極の製造方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP59162852A JPS6141785A (ja)	1984-08-03	1984-08-03	活性陰極の製造方法

Publications (2)

Publication Number	Publication Date
JPS6141785A true JPS6141785A (ja)	1986-02-28
JPH0245719B2 JPH0245719B2 (mo)	1990-10-11

Family

ID=15762464

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP59162852A Granted JPS6141785A (ja)	1984-08-03	1984-08-03	活性陰極の製造方法

Country Status (1)

Country	Link
JP (1)	JPS6141785A (mo)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2011503359A (ja) *	2007-11-16	2011-01-27	アクゾノーベルナムローゼフェンノートシャップ	電極

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5794583A (en) *	1980-12-02	1982-06-12	Toagosei Chem Ind Co Ltd	Manufacture of cathode for generating hydrogen
JPS5831091A (ja) *	1981-08-18	1983-02-23	Asahi Glass Co Ltd	電極の製造方法
JPS58213887A (ja) *	1982-06-08	1983-12-12	Toyo Soda Mfg Co Ltd	電解用電極

1984
- 1984-08-03 JP JP59162852A patent/JPS6141785A/ja active Granted

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5794583A (en) *	1980-12-02	1982-06-12	Toagosei Chem Ind Co Ltd	Manufacture of cathode for generating hydrogen
JPS5831091A (ja) *	1981-08-18	1983-02-23	Asahi Glass Co Ltd	電極の製造方法
JPS58213887A (ja) *	1982-06-08	1983-12-12	Toyo Soda Mfg Co Ltd	電解用電極

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2011503359A (ja) *	2007-11-16	2011-01-27	アクゾノーベルナムローゼフェンノートシャップ	電極
US8764963B2 (en)	2007-11-16	2014-07-01	Akzo Nobel N.V.	Electrode

Also Published As

Publication number	Publication date
JPH0245719B2 (mo)	1990-10-11

Legal Events

Date	Code	Title	Description
2004-08-03	EXPY	Cancellation because of completion of term

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