JPS6156859A - 搬送方法 - Google Patents

搬送方法

Info

Publication number
JPS6156859A
JPS6156859A JP59178389A JP17838984A JPS6156859A JP S6156859 A JPS6156859 A JP S6156859A JP 59178389 A JP59178389 A JP 59178389A JP 17838984 A JP17838984 A JP 17838984A JP S6156859 A JPS6156859 A JP S6156859A
Authority
JP
Japan
Prior art keywords
station
conveying
track
empty
car
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59178389A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158021B2 (sr
Inventor
Keiichi Shibata
圭一 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59178389A priority Critical patent/JPS6156859A/ja
Publication of JPS6156859A publication Critical patent/JPS6156859A/ja
Publication of JPH0158021B2 publication Critical patent/JPH0158021B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1426—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Multi-Process Working Machines And Systems (AREA)
  • Discharge Of Articles From Conveyors (AREA)
JP59178389A 1984-08-29 1984-08-29 搬送方法 Granted JPS6156859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59178389A JPS6156859A (ja) 1984-08-29 1984-08-29 搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59178389A JPS6156859A (ja) 1984-08-29 1984-08-29 搬送方法

Publications (2)

Publication Number Publication Date
JPS6156859A true JPS6156859A (ja) 1986-03-22
JPH0158021B2 JPH0158021B2 (sr) 1989-12-08

Family

ID=16047636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59178389A Granted JPS6156859A (ja) 1984-08-29 1984-08-29 搬送方法

Country Status (1)

Country Link
JP (1) JPS6156859A (sr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329944A (ja) * 1986-07-24 1988-02-08 Nikon Corp ウエハ又はウエハキヤリヤの搬送装置
JPH02132840A (ja) * 1988-02-12 1990-05-22 Tokyo Electron Ltd 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法
US5339128A (en) * 1988-02-12 1994-08-16 Tokyo Electron Limited Resist processing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329944A (ja) * 1986-07-24 1988-02-08 Nikon Corp ウエハ又はウエハキヤリヤの搬送装置
JPH02132840A (ja) * 1988-02-12 1990-05-22 Tokyo Electron Ltd 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法
US5339128A (en) * 1988-02-12 1994-08-16 Tokyo Electron Limited Resist processing method

Also Published As

Publication number Publication date
JPH0158021B2 (sr) 1989-12-08

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