JPS6157865U - - Google Patents

Info

Publication number
JPS6157865U
JPS6157865U JP14230584U JP14230584U JPS6157865U JP S6157865 U JPS6157865 U JP S6157865U JP 14230584 U JP14230584 U JP 14230584U JP 14230584 U JP14230584 U JP 14230584U JP S6157865 U JPS6157865 U JP S6157865U
Authority
JP
Japan
Prior art keywords
cantilever beam
diffused resistor
insulating film
semiconductor
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14230584U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14230584U priority Critical patent/JPS6157865U/ja
Publication of JPS6157865U publication Critical patent/JPS6157865U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)

Description

【図面の簡単な説明】
第１図は本考案の主要部断面図、第２図は従来
装置の平面図及び断面図、第３図は第１図の装置
の製造工程を示す図である。 符号の説明、１１…Ｓｉ基板、１２…Ｓｉ片持
ばり、１３…拡散抵抗、１４…表面絶縁膜、１５
…裏面絶縁膜。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体基板上に形成され、一端を支持された片
    持ばりの支持部付近に拡散抵抗を形成し、上記片
    持ばりの偏位に応じて上記拡散抵抗に生じる抵抗
    値の変化を検出することによつて加速度を検出す
    る半導体加速度センサにおいて、上記片持ばりの
    表面及び裏面に同一膜質で同一膜厚の絶縁膜を直
    接低温で形成したことを特徴とする半導体加速度
    センサ。
JP14230584U 1984-09-21 1984-09-21 Pending JPS6157865U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14230584U JPS6157865U (ja) 1984-09-21 1984-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14230584U JPS6157865U (ja) 1984-09-21 1984-09-21

Publications (1)

Publication Number Publication Date
JPS6157865U true JPS6157865U (ja) 1986-04-18

Family

ID=30700629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14230584U Pending JPS6157865U (ja) 1984-09-21 1984-09-21

Country Status (1)

Country Link
JP (1) JPS6157865U (ja)

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