JPS62109737U - - Google Patents

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Publication number
JPS62109737U
JPS62109737U JP19940485U JP19940485U JPS62109737U JP S62109737 U JPS62109737 U JP S62109737U JP 19940485 U JP19940485 U JP 19940485U JP 19940485 U JP19940485 U JP 19940485U JP S62109737 U JPS62109737 U JP S62109737U
Authority
JP
Japan
Prior art keywords
sample
gas
switching valve
transfer pipe
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19940485U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19940485U priority Critical patent/JPS62109737U/ja
Publication of JPS62109737U publication Critical patent/JPS62109737U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図、第２図は本考案の一実施例である真空
処理装置を示す断面図である。 １……処理室、２……試料台電極、６，９……
ガス移送管、１１……シリンダ、１２……ガス供
給装置、１７……切換え弁室、１８……切換え弁
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 内部が真空排気される処理室と、該処理室内に
    あつて試料を載置し前記処理室内にプラズマを発
    生させるための資料台電極と、該試料台電極上の
    プラズマ処理によつて高温加熱した試料の熱伝導
    による放熱を促進させる熱伝導媒体ガスを供給す
    るガス供給装置と、前記試料台電極と前記試料と
    の間に前記ガス供給装置からの熱伝導媒体ガスを
    移送するガス移送管とから成り、前記試料台電極
    の内部に前記ガス移送管が通り途中に切換え弁室
    を有し、前記ガス移送管には前記試料台電極内部
    の切換え弁室部で切換え弁を有し、前記切換え弁
    室内で前記切換え弁を上下させ前記熱伝導媒体ガ
    スの流路を切り換える昇降手段を具備したことを
    特徴とする真空処理装置。
JP19940485U 1985-12-27 1985-12-27 Pending JPS62109737U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19940485U JPS62109737U (ja) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19940485U JPS62109737U (ja) 1985-12-27 1985-12-27

Publications (1)

Publication Number Publication Date
JPS62109737U true JPS62109737U (ja) 1987-07-13

Family

ID=31160996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19940485U Pending JPS62109737U (ja) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPS62109737U (ja)

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