JPS6243133A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6243133A
JPS6243133A JP18443085A JP18443085A JPS6243133A JP S6243133 A JPS6243133 A JP S6243133A JP 18443085 A JP18443085 A JP 18443085A JP 18443085 A JP18443085 A JP 18443085A JP S6243133 A JPS6243133 A JP S6243133A
Authority
JP
Japan
Prior art keywords
etching
insulating film
contact hole
tapered
anisotropic etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18443085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH051977B2 (de
Inventor
Hiroyuki Morita
博之 森田
Kyusaku Nishioka
西岡　久作
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP18443085A priority Critical patent/JPS6243133A/ja
Publication of JPS6243133A publication Critical patent/JPS6243133A/ja
Publication of JPH051977B2 publication Critical patent/JPH051977B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP18443085A 1985-08-20 1985-08-20 半導体装置の製造方法 Granted JPS6243133A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18443085A JPS6243133A (ja) 1985-08-20 1985-08-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18443085A JPS6243133A (ja) 1985-08-20 1985-08-20 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6243133A true JPS6243133A (ja) 1987-02-25
JPH051977B2 JPH051977B2 (de) 1993-01-11

Family

ID=16153012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18443085A Granted JPS6243133A (ja) 1985-08-20 1985-08-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6243133A (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01194327A (ja) * 1988-01-29 1989-08-04 Toshiba Corp 半導体装置の製造方法
JPH02213129A (ja) * 1989-02-14 1990-08-24 Mitsubishi Electric Corp 半導体装置及びその製造方法
JPH0383064A (ja) * 1989-07-28 1991-04-09 American Teleph & Telegr Co <Att> 集積回路半導体デバイスのエッチング法
US5567270A (en) * 1995-10-16 1996-10-22 Winbond Electronics Corp. Process of forming contacts and vias having tapered sidewall
JP2013122487A (ja) * 2011-12-09 2013-06-20 Konica Minolta Medical & Graphic Inc 金属格子の製造方法、金属格子およびｘ線撮像装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021679A (de) * 1973-06-25 1975-03-07
JPS5687666A (en) * 1979-12-20 1981-07-16 Toshiba Corp Plasma etching method
JPS56157025A (en) * 1980-05-07 1981-12-04 Nec Corp Manufacture of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021679A (de) * 1973-06-25 1975-03-07
JPS5687666A (en) * 1979-12-20 1981-07-16 Toshiba Corp Plasma etching method
JPS56157025A (en) * 1980-05-07 1981-12-04 Nec Corp Manufacture of semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01194327A (ja) * 1988-01-29 1989-08-04 Toshiba Corp 半導体装置の製造方法
JPH02213129A (ja) * 1989-02-14 1990-08-24 Mitsubishi Electric Corp 半導体装置及びその製造方法
JPH0383064A (ja) * 1989-07-28 1991-04-09 American Teleph & Telegr Co <Att> 集積回路半導体デバイスのエッチング法
US5567270A (en) * 1995-10-16 1996-10-22 Winbond Electronics Corp. Process of forming contacts and vias having tapered sidewall
JP2013122487A (ja) * 2011-12-09 2013-06-20 Konica Minolta Medical & Graphic Inc 金属格子の製造方法、金属格子およびｘ線撮像装置

Also Published As

Publication number Publication date
JPH051977B2 (de) 1993-01-11

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