JPS6319094U - - Google Patents

Info

Publication number
JPS6319094U
JPS6319094U JP11194686U JP11194686U JPS6319094U JP S6319094 U JPS6319094 U JP S6319094U JP 11194686 U JP11194686 U JP 11194686U JP 11194686 U JP11194686 U JP 11194686U JP S6319094 U JPS6319094 U JP S6319094U
Authority
JP
Japan
Prior art keywords
slits
pair
stator
turbo
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11194686U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11194686U priority Critical patent/JPS6319094U/ja
Publication of JPS6319094U publication Critical patent/JPS6319094U/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例によるターボ分子
ポンプを示す部分断面図、第２図はその固定子の
平面図、第３図は従来のターボ分子ポンプを示す
部分断面図、第４図はその固定子の平面図である
。 図において、１は回転子、３はスペーサ、４は
固定子、５は一対のコ字状スリツト、６は頂部、
７は頚部、８は静翼、９は梁部である。なお、各
図中同一符号は同一または相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 相互に同軸心の回転子と固定子とを軸方向に交
    互に複数段配置してなるターボ分子ポンプにおい
    て、上記固定子は、コ字状の頂部を対向させた一
    対のスリツトを、薄板円環の同一円周上に等間隔
    に設けるとともに、上記頂部間のくびれ部に形成
    された頚部を軸として上記一対のスリツトに囲ま
    れた部分を所定の角度捩曲することにより、上記
    一対のスリツトに囲まれた部分が傾斜して形成さ
    れる静翼と、上記一対のスリツトが隣接した部分
    に形成される梁部とを備えたことを特徴とするタ
    ーボ分子ポンプ。
JP11194686U 1986-07-21 1986-07-21 Pending JPS6319094U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11194686U JPS6319094U (ja) 1986-07-21 1986-07-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11194686U JPS6319094U (ja) 1986-07-21 1986-07-21

Publications (1)

Publication Number Publication Date
JPS6319094U true JPS6319094U (ja) 1988-02-08

Family

ID=30992357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11194686U Pending JPS6319094U (ja) 1986-07-21 1986-07-21

Country Status (1)

Country Link
JP (1) JPS6319094U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006348935A (ja) * 2005-06-11 2006-12-28 Pfeiffer Vacuum Gmbh ターボ分子ポンプ用ステータ・ディスク

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006348935A (ja) * 2005-06-11 2006-12-28 Pfeiffer Vacuum Gmbh ターボ分子ポンプ用ステータ・ディスク

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