JPS63274692A - ダイヤモンドの合成方法 - Google Patents

ダイヤモンドの合成方法

Info

Publication number: JPS63274692A
Authority: JP; Japan
Prior art keywords: diamond; gas; raw material; carbon monoxide; hydrogen
Prior art date: 1987-05-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP10919387A

Other languages

English (en)

Japanese (ja)

Other versions

JPH042556B2 (fr

Inventor

Toshimichi Ito

伊藤　利通

Masaaki Nosaka

野坂　正昭

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Idemitsu Petrochemical Co Ltd

Original Assignee

Idemitsu Petrochemical Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-05-02

Filing date

1987-05-02

Publication date

1988-11-11

1987-05-02 Application filed by Idemitsu Petrochemical Co Ltd filed Critical Idemitsu Petrochemical Co Ltd

1987-05-02 Priority to JP10919387A priority Critical patent/JPS63274692A/ja

1988-04-21 Priority to DE88106419T priority patent/DE3884658T2/de

1988-04-21 Priority to NO881723A priority patent/NO881723L/no

1988-04-21 Priority to US07/184,561 priority patent/US4985227A/en

1988-04-21 Priority to EP88106419A priority patent/EP0288065B1/fr

1988-04-22 Priority to KR1019880004591A priority patent/KR910008728B1/ko

1988-04-22 Priority to CA000564794A priority patent/CA1327772C/fr

1988-11-11 Publication of JPS63274692A publication Critical patent/JPS63274692A/ja

1989-02-09 Priority to US07/308,087 priority patent/US4984534A/en

1991-05-29 Priority to KR1019910008772A priority patent/KR910008729B1/ko

1992-01-20 Publication of JPH042556B2 publication Critical patent/JPH042556B2/ja

1994-02-14 Priority to NO940494A priority patent/NO940494D0/no

Status Granted legal-status Critical Current

Links

239000010432 diamond Substances 0.000 title claims abstract description 46
229910003460 diamond Inorganic materials 0.000 title claims abstract description 41
230000015572 biosynthetic process Effects 0.000 title description 3
238000003786 synthesis reaction Methods 0.000 title description 3
229910002091 carbon monoxide Inorganic materials 0.000 claims abstract description 29
239000000758 substrate Substances 0.000 claims abstract description 20
239000007789 gas Substances 0.000 claims description 46
UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 27
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 23
239000001257 hydrogen Substances 0.000 claims description 19
229910052739 hydrogen Inorganic materials 0.000 claims description 19
238000001308 synthesis method Methods 0.000 claims description 2
238000000034 method Methods 0.000 abstract description 37
239000002994 raw material Substances 0.000 abstract description 16
238000000151 deposition Methods 0.000 abstract description 14
230000008021 deposition Effects 0.000 abstract description 13
238000005268 plasma chemical vapour deposition Methods 0.000 abstract description 10
239000000126 substance Substances 0.000 abstract description 8
238000010884 ion-beam technique Methods 0.000 abstract description 3
230000005281 excited state Effects 0.000 abstract description 2
239000008246 gaseous mixture Substances 0.000 abstract 4
238000005019 vapor deposition process Methods 0.000 abstract 2
238000004544 sputter deposition Methods 0.000 abstract 1
XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 16
OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 15
238000006243 chemical reaction Methods 0.000 description 10
238000001069 Raman spectroscopy Methods 0.000 description 8
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
229930195733 hydrocarbon Natural products 0.000 description 8
150000002430 hydrocarbons Chemical group 0.000 description 8
VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
239000011787 zinc oxide Substances 0.000 description 8
230000002194 synthesizing effect Effects 0.000 description 6
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 4
239000003054 catalyst Substances 0.000 description 4
229910000423 chromium oxide Inorganic materials 0.000 description 4
230000000052 comparative effect Effects 0.000 description 4
239000013078 crystal Substances 0.000 description 4
239000012535 impurity Substances 0.000 description 4
239000000463 material Substances 0.000 description 4
239000000377 silicon dioxide Substances 0.000 description 4
238000004611 spectroscopical analysis Methods 0.000 description 4
238000001228 spectrum Methods 0.000 description 4
238000007740 vapor deposition Methods 0.000 description 4
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
229910052799 carbon Inorganic materials 0.000 description 3
230000000694 effects Effects 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
229910052710 silicon Inorganic materials 0.000 description 3
239000010703 silicon Substances 0.000 description 3
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
239000004215 Carbon black (E152) Substances 0.000 description 2
QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
239000005751 Copper oxide Substances 0.000 description 2
YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 2
238000005229 chemical vapour deposition Methods 0.000 description 2
239000003245 coal Substances 0.000 description 2
229910000431 copper oxide Inorganic materials 0.000 description 2
239000012776 electronic material Substances 0.000 description 2
238000005516 engineering process Methods 0.000 description 2
238000002309 gasification Methods 0.000 description 2
229910021385 hard carbon Inorganic materials 0.000 description 2
239000012770 industrial material Substances 0.000 description 2
239000011261 inert gas Substances 0.000 description 2
229910000464 lead oxide Inorganic materials 0.000 description 2
CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
239000000395 magnesium oxide Substances 0.000 description 2
AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
238000002156 mixing Methods 0.000 description 2
230000003287 optical effect Effects 0.000 description 2
YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 2
238000002360 preparation method Methods 0.000 description 2
239000000047 product Substances 0.000 description 2
238000001771 vacuum deposition Methods 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
239000000956 alloy Substances 0.000 description 1
229910045601 alloy Inorganic materials 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
229910052786 argon Inorganic materials 0.000 description 1
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
239000011651 chromium Substances 0.000 description 1
239000010941 cobalt Substances 0.000 description 1
229910017052 cobalt Inorganic materials 0.000 description 1
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
239000000571 coke Substances 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
230000000875 corresponding effect Effects 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
238000000354 decomposition reaction Methods 0.000 description 1
229910001873 dinitrogen Inorganic materials 0.000 description 1
238000005868 electrolysis reaction Methods 0.000 description 1
230000005284 excitation Effects 0.000 description 1
239000001307 helium Substances 0.000 description 1
229910052734 helium Inorganic materials 0.000 description 1
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
150000002431 hydrogen Chemical class 0.000 description 1
125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
238000007737 ion beam deposition Methods 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
150000001247 metal acetylides Chemical class 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
230000029052 metamorphosis Effects 0.000 description 1
239000000203 mixture Substances 0.000 description 1
229910052750 molybdenum Inorganic materials 0.000 description 1
239000011733 molybdenum Substances 0.000 description 1
239000003345 natural gas Substances 0.000 description 1
229910052754 neon Inorganic materials 0.000 description 1
GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
150000004767 nitrides Chemical class 0.000 description 1
-1 oxides Chemical class 0.000 description 1
239000001301 oxygen Substances 0.000 description 1
229910052760 oxygen Inorganic materials 0.000 description 1
239000003208 petroleum Substances 0.000 description 1
239000002244 precipitate Substances 0.000 description 1
230000001681 protective effect Effects 0.000 description 1
238000004062 sedimentation Methods 0.000 description 1
230000002269 spontaneous effect Effects 0.000 description 1
239000010936 titanium Substances 0.000 description 1
229910052719 titanium Inorganic materials 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1
238000009834 vaporization Methods 0.000 description 1
230000008016 vaporization Effects 0.000 description 1
229910052724 xenon Inorganic materials 0.000 description 1
FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1

Landscapes

Crystals, And After-Treatments Of Crystals (AREA)

JP10919387A 1987-04-22 1987-05-02 ダイヤモンドの合成方法 Granted JPS63274692A (ja)

Priority Applications (10)

Application Number	Priority Date	Filing Date	Title
JP10919387A JPS63274692A (ja)	1987-05-02	1987-05-02	ダイヤモンドの合成方法
DE88106419T DE3884658T2 (de)	1987-04-22	1988-04-21	Verfahren zur Diamantsynthese.
NO881723A NO881723L (no)	1987-04-22	1988-04-21	Fremgangsmaate og innretning for fremstilling av diamanter.
US07/184,561 US4985227A (en)	1987-04-22	1988-04-21	Method for synthesis or diamond
EP88106419A EP0288065B1 (fr)	1987-04-22	1988-04-21	Méthode pour la synthèse de diamant
KR1019880004591A KR910008728B1 (ko)	1987-04-22	1988-04-22	다이어몬드의 합성방법 및 합성장치
CA000564794A CA1327772C (fr)	1987-04-22	1988-04-22	Methode de synthese du diamant
US07/308,087 US4984534A (en)	1987-04-22	1989-02-09	Method for synthesis of diamond
KR1019910008772A KR910008729B1 (ko)	1987-04-22	1991-05-29	다이어몬드의 합성방법
NO940494A NO940494D0 (no)	1987-04-22	1994-02-14	Fremgangsmåte og apparat for diamantsyntese

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP10919387A JPS63274692A (ja)	1987-05-02	1987-05-02	ダイヤモンドの合成方法

Publications (2)

Publication Number	Publication Date
JPS63274692A true JPS63274692A (ja)	1988-11-11
JPH042556B2 JPH042556B2 (fr)	1992-01-20

Family

ID=14503987

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP10919387A Granted JPS63274692A (ja)	1987-04-22	1987-05-02	ダイヤモンドの合成方法

Country Status (1)

Country	Link
JP (1)	JPS63274692A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH02167892A (ja) *	1988-12-21	1990-06-28	Ishizuka Kenkyusho:Kk	気相反応によるダイヤモンド合成法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS62265198A (ja) *	1986-05-14	1987-11-18	Hitachi Ltd	ダイヤモンドの合成方法

1987
- 1987-05-02 JP JP10919387A patent/JPS63274692A/ja active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS62265198A (ja) *	1986-05-14	1987-11-18	Hitachi Ltd	ダイヤモンドの合成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH02167892A (ja) *	1988-12-21	1990-06-28	Ishizuka Kenkyusho:Kk	気相反応によるダイヤモンド合成法

Also Published As

Publication number	Publication date
JPH042556B2 (fr)	1992-01-20

Legal Events

Date	Code	Title	Description
2005-01-20	LAPS	Cancellation because of no payment of annual fees

Publication	Publication Date	Title
US4985227A (en)	1991-01-15	Method for synthesis or diamond
JPS61158899A (ja)	1986-07-18	ダイヤモンド膜の製法
JPS63274692A (ja)	1988-11-11	ダイヤモンドの合成方法
JPS6054996A (ja)	1985-03-29	ダイヤモンドの合成法
JPH0361633B2 (fr)	1991-09-20
JPH01197391A (ja)	1989-08-09	ダイヤモンドの合成方法
KR910008729B1 (ko)	1991-10-19	다이어몬드의 합성방법
JP2585342B2 (ja)	1997-02-26	ダイヤモンド気相合成法
JPS63128179A (ja)	1988-05-31	硬質窒化硼素の合成方法および合成装置
JPS63274693A (ja)	1988-11-11	ダイヤモンドの製造方法
JPS62243770A (ja)	1987-10-24	高硬度窒化ホウ素の合成方法
JPH01141897A (ja)	1989-06-02	ダイヤモンドの合成方法
JPS63277767A (ja)	1988-11-15	高圧相窒化ホウ素の気相合成法
JPH01246195A (ja)	1989-10-02	ダイヤモンドの合成方法
JPH0449518B2 (fr)	1992-08-11
JPH01317198A (ja)	1989-12-21	ダイヤモンド等の合成方法
JPH01201098A (ja)	1989-08-14	ダイヤモンドの合成方法
JPH01266A (ja)	1989-01-05	ダイヤモンド状炭素の製造方法
JP3093836B2 (ja)	2000-10-03	ダイヤモンド膜作製方法
JPS63297299A (ja)	1988-12-05	ダイヤモンドの気相合成法
JP2581330B2 (ja)	1997-02-12	燃焼炎によるダイヤモンドの合成法
JPH0814024B2 (ja)	1996-02-14	高圧相窒化ホウ素の気相合成法
JPS62280364A (ja)	1987-12-05	硬質窒化硼素の合成方法
JPH01201479A (ja)	1989-08-14	ダイヤモンド被覆水素脆性金属及びその製造方法
JPH01290592A (ja)	1989-11-22	ダイヤモンドの合成方法

JPS63274692A - ダイヤモンドの合成方法 - Google Patents

Info

Links

Landscapes

Priority Applications (10)

Applications Claiming Priority (1)

Publications (2)

Family

ID=14503987

Family Applications (1)

Country Status (1)

Cited By (1)

Citations (1)

Patent Citations (1)

Cited By (1)

Also Published As

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