JPS6339796B2 - - Google Patents

Info

Publication number: JPS6339796B2
Authority: JP; Japan
Prior art keywords: shield; exhaust port; plate; cryopump; panel
Prior art date: 1984-12-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP27200984A

Other languages

English (en)

Japanese (ja)

Other versions

JPS61149589A (ja

Inventor

Hiroyuki Yamakawa

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ulvac Inc

Original Assignee

Ulvac Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-12-25

Filing date

1984-12-25

Publication date

1988-08-08

1984-12-25 Application filed by Ulvac Inc filed Critical Ulvac Inc

1984-12-25 Priority to JP27200984A priority Critical patent/JPS61149589A/ja

1986-07-08 Publication of JPS61149589A publication Critical patent/JPS61149589A/ja

1988-08-08 Publication of JPS6339796B2 publication Critical patent/JPS6339796B2/ja

Status Granted legal-status Critical Current

Links

230000005494 condensation Effects 0.000 claims description 14
238000009833 condensation Methods 0.000 claims description 14
238000005086 pumping Methods 0.000 description 13
230000000694 effects Effects 0.000 description 5
230000003247 decreasing effect Effects 0.000 description 2
238000004544 sputter deposition Methods 0.000 description 2
238000001816 cooling Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000006073 displacement reaction Methods 0.000 description 1
239000002245 particle Substances 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Landscapes

Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

JP27200984A 1984-12-25 1984-12-25 クライオポンプ Granted JPS61149589A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP27200984A JPS61149589A (ja)	1984-12-25	1984-12-25	クライオポンプ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP27200984A JPS61149589A (ja)	1984-12-25	1984-12-25	クライオポンプ

Publications (2)

Publication Number	Publication Date
JPS61149589A JPS61149589A (ja)	1986-07-08
JPS6339796B2 true JPS6339796B2 (2)	1988-08-08

Family

ID=17507865

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP27200984A Granted JPS61149589A (ja)	1984-12-25	1984-12-25	クライオポンプ

Country Status (1)

Country	Link
JP (1)	JPS61149589A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2006314864A (ja) *	2005-05-10	2006-11-24	Mitsubishi Electric Corp	排気トラップ装置

1984
- 1984-12-25 JP JP27200984A patent/JPS61149589A/ja active Granted

Also Published As

Publication number	Publication date
JPS61149589A (ja)	1986-07-08

Similar Documents

Publication	Publication Date	Title
JP2731276B2 (ja)	1998-03-25	２段式の冷凍機により作動されるクライオポンプ
US6155059A (en)	2000-12-05	High capacity cryopump
JPS57179952A (en)	1982-11-05	Method and apparatus for magnetic recording medium
CN104074716A (zh)	2014-10-01	低温泵及真空排气方法
US5301511A (en)	1994-04-12	Cryopump and cryopanel having frost concentrating device
CA2145654A1 (en)	1994-05-11	Remote Region Vacuum Regulator
JP3609474B2 (ja)	2005-01-12	クライオポンプ
IE821649L (en)	1983-01-16	Sputtering system.
JPS61149589A (ja)	1986-07-08	クライオポンプ
JPS5371725A (en)	1978-06-26	Exhaust gas re-circulating device for internal combustion engine
US5343709A (en)	1994-09-06	Cryopump
JPS57134559A (en)	1982-08-19	Physical vapor deposition device
JPS5660883A (en)	1981-05-26	Compressor
JPS5583143A (en)	1980-06-23	Exhaust system for electron beam equipment
FR2379308A1 (fr)	1978-09-01	Filtre du type a plaques comprenant des agencements de plaque perfectionnes
JPS6334316B2 (2)	1988-07-08
SU883551A1 (ru)	1981-11-23	Криогенный форвакуумный конденсационный насос
SU992814A2 (ru)	1983-01-30	Криогенный конденсационный насос
JPS606085A (ja)	1985-01-12	クライオポンプ装置
JPS61123775A (ja)	1986-06-11	クライオポンプ
JPS5641342A (en)	1981-04-18	Electrode material for sputtering ion pump
JPS6352110B2 (2)	1988-10-18
JPS6011093Y2 (ja)	1985-04-13	スパツタリング装置
GB709819A (en)	1954-06-02	Cold traps for vacuum systems
SU688693A1 (ru)	1979-09-30	Вымораживающа чейка криогенного вакуумного насоса

Legal Events

Date	Code	Title	Description
2004-08-24	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250
2004-12-25	EXPY	Cancellation because of completion of term