JPS6373337U - - Google Patents

Info

Publication number
JPS6373337U
JPS6373337U JP1986168197U JP16819786U JPS6373337U JP S6373337 U JPS6373337 U JP S6373337U JP 1986168197 U JP1986168197 U JP 1986168197U JP 16819786 U JP16819786 U JP 16819786U JP S6373337 U JPS6373337 U JP S6373337U
Authority
JP
Japan
Prior art keywords
container
workpiece
carry
adhesive
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986168197U
Other languages
English (en)
Other versions
JPH0543079Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16819786U priority Critical patent/JPH0543079Y2/ja
Priority to PH34571A priority patent/PH25206A/en
Priority to EP86117185A priority patent/EP0226949B1/en
Priority to DE8686117185T priority patent/DE3686314T2/de
Priority to US06/940,328 priority patent/US4718967A/en
Priority to KR1019860010635A priority patent/KR900004688B1/ko
Publication of JPS6373337U publication Critical patent/JPS6373337U/ja
Priority to SG1063/92A priority patent/SG106392G/en
Application granted granted Critical
Publication of JPH0543079Y2 publication Critical patent/JPH0543079Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Adhesives Or Adhesive Processes (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例の全体正面図、第２図
は第１図の平面図、第３図は第１図の一部を截除
した左側面図、第４図は第１図の―線断面図
、第５図はカセツトケースの斜視図、第６図はワ
ークの斜視図、第７図は密閉状態の密閉容器の拡
大断面図、第８図はワークの回転状態を示す平面
線図、第９図は第２図の―線部分の側面図で
ある。 ６…密閉容器、１２…光源、１４…搬出コンベ
ア、１７…ワーク、２１…搬入アーム、２２…搬
出アーム、２５…接着剤、２６…薄板、２７…半
導体ウエハ、３２…蓋体、３３…透光窓、３５…
脱酸素装置、３９…テーブル。

Claims (1)

    【実用新案登録請求の範囲】
  1. 透光窓及び開閉自在の蓋体を備え、内部に半導
    体ウエハを光硬化性の接着剤により透光性の合成
    樹脂フイルム等の薄板に接着したワークが収容さ
    れる密閉容器と、該容器の透光窓に対向する水銀
    灯等の光源とを有し、該容器にその内部の雰囲気
    から酸素成分を排除する脱酸素装置を接続し、さ
    らに該密閉容器の側方に、該容器の外部から内部
    へ該ワークを搬入する旋回自在の搬入アームと、
    該容器の内部から外部へ該ワークを搬出する旋回
    自在の搬出アームとを設けるようにしたものに於
    て、該搬出アームの搬出移動位置に、搬出された
    ワークを受取つてこれに所定の角度の旋回を与え
    ると共に下方の搬出コンベア上へ移送するテーブ
    ルを設けたことを特徴とする半導体ウエハと薄板
    を接着する接着剤の接着力制御装置。
JP16819786U 1985-12-12 1986-11-04 Expired - Lifetime JPH0543079Y2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP16819786U JPH0543079Y2 (ja) 1986-11-04 1986-11-04
PH34571A PH25206A (en) 1985-12-12 1986-12-09 Control apparatus for reducing adhesive force of adhesive agent adhering between semiconductor wafer and substrate
DE8686117185T DE3686314T2 (de) 1985-12-12 1986-12-10 Vorrichtung zur bestimmung der haftkraefte eines klebstoffes zwischen einem halbleiter und seinem substrat.
EP86117185A EP0226949B1 (en) 1985-12-12 1986-12-10 Control apparatus for adhesive force of adhesive agent adhering between semiconductor wafer and substrate
US06/940,328 US4718967A (en) 1985-12-12 1986-12-11 Control apparatus for reducing adhesive force of adhesive agent adhering between semiconductor wafer and substrate
KR1019860010635A KR900004688B1 (ko) 1985-12-12 1986-12-12 반도체 웨이퍼와 박판을 접착하는 접착제의 접착력 제어장치
SG1063/92A SG106392G (en) 1985-12-12 1992-10-13 Control apparatus for adhesive force of adhesive agent adhering between semiconductor wafer and substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16819786U JPH0543079Y2 (ja) 1986-11-04 1986-11-04

Publications (2)

Publication Number Publication Date
JPS6373337U true JPS6373337U (ja) 1988-05-16
JPH0543079Y2 JPH0543079Y2 (ja) 1993-10-29

Family

ID=31100851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16819786U Expired - Lifetime JPH0543079Y2 (ja) 1985-12-12 1986-11-04

Country Status (1)

Country Link
JP (1) JPH0543079Y2 (ja)

Also Published As

Publication number Publication date
JPH0543079Y2 (ja) 1993-10-29

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