JPS6417425A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6417425A JPS6417425A JP17287287A JP17287287A JPS6417425A JP S6417425 A JPS6417425 A JP S6417425A JP 17287287 A JP17287287 A JP 17287287A JP 17287287 A JP17287287 A JP 17287287A JP S6417425 A JPS6417425 A JP S6417425A
- Authority
- JP
- Japan
- Prior art keywords
- film
- impurity
- dopant added
- dopant
- annealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002019 doping agent Substances 0.000 abstract 6
- 239000012535 impurity Substances 0.000 abstract 6
- 238000000137 annealing Methods 0.000 abstract 4
- 238000009792 diffusion process Methods 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17287287A JPS6417425A (en) | 1987-07-13 | 1987-07-13 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17287287A JPS6417425A (en) | 1987-07-13 | 1987-07-13 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6417425A true JPS6417425A (en) | 1989-01-20 |
Family
ID=15949868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17287287A Pending JPS6417425A (en) | 1987-07-13 | 1987-07-13 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6417425A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02208929A (ja) * | 1989-02-08 | 1990-08-20 | Rohm Co Ltd | 半導体装置の製造方法 |
| JP2006310373A (ja) * | 2005-04-26 | 2006-11-09 | Shin Etsu Handotai Co Ltd | 太陽電池の製造方法及び太陽電池並びに半導体装置の製造方法 |
-
1987
- 1987-07-13 JP JP17287287A patent/JPS6417425A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02208929A (ja) * | 1989-02-08 | 1990-08-20 | Rohm Co Ltd | 半導体装置の製造方法 |
| JP2006310373A (ja) * | 2005-04-26 | 2006-11-09 | Shin Etsu Handotai Co Ltd | 太陽電池の製造方法及び太陽電池並びに半導体装置の製造方法 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5467778A (en) | Production of semiconductor device | |
| JPS6417425A (en) | Manufacture of semiconductor device | |
| JPS5763841A (en) | Preparation of semiconductor device | |
| JPS5339081A (en) | Semiconductor device | |
| JPS5346272A (en) | Impurity diffusion method | |
| JPS5272162A (en) | Production of semiconductor device | |
| JPS5538082A (en) | Formation for buried layer of semiconductor device | |
| JPS56122126A (en) | Manufacture of semiconductor device | |
| JPS6457627A (en) | Manufacture of semiconductor device | |
| EP0305977A3 (en) | Method for doping a semiconductor integrated circuit | |
| JPS5745275A (en) | Production of transistor | |
| JPS564285A (en) | Manufacture of planar type semiconductor device | |
| JPS6464258A (en) | Manufacture of semiconductor device | |
| JPS6455866A (en) | Manufacture of semiconductor device | |
| JPS5693315A (en) | Manufacture of semiconductor device | |
| JPS5690528A (en) | Surface treatment of semiconductor device | |
| JPS55165627A (en) | Method for diffusing impurity into semiconductor | |
| JPS54101663A (en) | Aluminum diffusion method | |
| JPS54102965A (en) | Impurity diffusion method | |
| JPS5275268A (en) | Method of diffusing impurity into semiconductor | |
| JPS5275270A (en) | Method of diffusing impurity in semiconductor | |
| JPS5724536A (en) | Preparation of semiconductor device | |
| JPS52154344A (en) | Impurity diffusion method | |
| JPS5680158A (en) | Semiconductor device | |
| JPS57194546A (en) | Semiconductor device and manufacture thereof |