JPS643097A - Substrate having high heat conductivity - Google Patents

Substrate having high heat conductivity

Info

Publication number
JPS643097A
JPS643097A JP15906487A JP15906487A JPS643097A JP S643097 A JPS643097 A JP S643097A JP 15906487 A JP15906487 A JP 15906487A JP 15906487 A JP15906487 A JP 15906487A JP S643097 A JPS643097 A JP S643097A
Authority
JP
Japan
Prior art keywords
substrate
diamond
layer
heat conductivity
polysilicone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15906487A
Other languages
English (en)
Other versions
JPH013097A (ja
Inventor
Noboru Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP15906487A priority Critical patent/JPS643097A/ja
Publication of JPH013097A publication Critical patent/JPH013097A/ja
Publication of JPS643097A publication Critical patent/JPS643097A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP15906487A 1987-06-25 1987-06-25 Substrate having high heat conductivity Pending JPS643097A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15906487A JPS643097A (en) 1987-06-25 1987-06-25 Substrate having high heat conductivity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15906487A JPS643097A (en) 1987-06-25 1987-06-25 Substrate having high heat conductivity

Publications (2)

Publication Number Publication Date
JPH013097A JPH013097A (ja) 1989-01-06
JPS643097A true JPS643097A (en) 1989-01-06

Family

ID=15685428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15906487A Pending JPS643097A (en) 1987-06-25 1987-06-25 Substrate having high heat conductivity

Country Status (1)

Country Link
JP (1) JPS643097A (ja)

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