JPS6431431A - Conveying method - Google Patents

Conveying method

Info

Publication number
JPS6431431A
JPS6431431A JP18659187A JP18659187A JPS6431431A JP S6431431 A JPS6431431 A JP S6431431A JP 18659187 A JP18659187 A JP 18659187A JP 18659187 A JP18659187 A JP 18659187A JP S6431431 A JPS6431431 A JP S6431431A
Authority
JP
Japan
Prior art keywords
cassette
arm
stopped
limit position
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18659187A
Other languages
English (en)
Other versions
JP2506379B2 (ja
Inventor
Kazuo Tezuka
Haruhiko Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62186591A priority Critical patent/JP2506379B2/ja
Publication of JPS6431431A publication Critical patent/JPS6431431A/ja
Application granted granted Critical
Publication of JP2506379B2 publication Critical patent/JP2506379B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62186591A 1987-07-28 1987-07-28 搬送方法及び搬送装置 Expired - Lifetime JP2506379B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62186591A JP2506379B2 (ja) 1987-07-28 1987-07-28 搬送方法及び搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62186591A JP2506379B2 (ja) 1987-07-28 1987-07-28 搬送方法及び搬送装置

Publications (2)

Publication Number Publication Date
JPS6431431A true JPS6431431A (en) 1989-02-01
JP2506379B2 JP2506379B2 (ja) 1996-06-12

Family

ID=16191229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62186591A Expired - Lifetime JP2506379B2 (ja) 1987-07-28 1987-07-28 搬送方法及び搬送装置

Country Status (1)

Country Link
JP (1) JP2506379B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU622893B2 (en) * 1988-03-29 1992-04-30 Toray Silicone Co. Ltd. Transparent flame-retardant silicone rubber compositions
JPH0677245U (ja) * 1994-04-22 1994-10-28 大日本スクリーン製造株式会社 半導体製造装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145326A (en) * 1980-12-29 1982-09-08 Censor Patent Versuch Method and device for forming pattern on wafer by photosensing semiconductor wafer
JPS5895636U (ja) * 1981-12-22 1983-06-29 キヤノン株式会社 ウエハ等の搬出入装置
JPS61188331A (ja) * 1985-02-15 1986-08-22 Nippon Texas Instr Kk 物体取出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145326A (en) * 1980-12-29 1982-09-08 Censor Patent Versuch Method and device for forming pattern on wafer by photosensing semiconductor wafer
JPS5895636U (ja) * 1981-12-22 1983-06-29 キヤノン株式会社 ウエハ等の搬出入装置
JPS61188331A (ja) * 1985-02-15 1986-08-22 Nippon Texas Instr Kk 物体取出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU622893B2 (en) * 1988-03-29 1992-04-30 Toray Silicone Co. Ltd. Transparent flame-retardant silicone rubber compositions
JPH0677245U (ja) * 1994-04-22 1994-10-28 大日本スクリーン製造株式会社 半導体製造装置

Also Published As

Publication number Publication date
JP2506379B2 (ja) 1996-06-12

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