JPS6437636U - - Google Patents

Info

Publication number
JPS6437636U
JPS6437636U JP1987132204U JP13220487U JPS6437636U JP S6437636 U JPS6437636 U JP S6437636U JP 1987132204 U JP1987132204 U JP 1987132204U JP 13220487 U JP13220487 U JP 13220487U JP S6437636 U JPS6437636 U JP S6437636U
Authority
JP
Japan
Prior art keywords
ceramic pressure
sensing element
pressure sensing
fixing member
detection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987132204U
Other languages
English (en)
Other versions
JPH0530122Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987132204U priority Critical patent/JPH0530122Y2/ja
Priority to US07/234,571 priority patent/US4916426A/en
Publication of JPS6437636U publication Critical patent/JPS6437636U/ja
Application granted granted Critical
Publication of JPH0530122Y2 publication Critical patent/JPH0530122Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第１図は、本考案に従う圧力検出器の一実施例
を示す半截断面図、第２図は、第１図の部分分解
斜視図、第３図及び第８図ａ，ｂは、それぞれ本
考案の圧力検出器の一実施例の要部を示す一部断
面図、第４図及び第５図は、それぞれ本考案の構
成要件である固定部材の一実施例を示す断面図、
第６図は、第１図の圧力検出素子の断面図、第７
図は、本考案の構成要件である圧力検出素子の一
実施例を示す断面図、第９図は、従来の圧力検出
器の断面説明図である。 １：圧力検出器、２：セラミツクス圧力検出素
子、３：固定部材、４：金属ハウジング、５：コ
イルバネ、６：金属ハウジングキヤツプ、７：絶
縁リング、８：ソケツト、９：リード線、１０：
セラミツクカプセル、１１：封着ガラス層、１２
：上部ハウジング、１３：下部ハウジング、１４
：圧力導入孔、１５：Ｏリング、１６：電子回路
、２１：ダイヤフラム部、２２：抵抗体、２３：
導体路、２４：外周壁、２５：外周壁の端面、２
６：電極、２７：トリミング抵抗体、３１：導体
層、３２：絶縁層、３３：スルーホール導体層、
３４：導体層、４１：金属ハウジングの開口部、
４２：金属ダイヤフラム部、４２：ネジ部、４４
：頭部、４５：変位伝達棒、５１：座金、６１：
肩部、７１：金属片、７２：金属端子、９１：シ
ールド管。
補正 昭６２．１２．１７ 図面の簡単な説明を次のように補正する。 明細書第１７頁第１０行の「である。」を「で
あり、第１０図は、ブリツジ回路の一例を示す回
路図である。」に訂正する。

Claims (1)

    【実用新案登録請求の範囲】
  1. 抵抗体を有するダイヤフラム部を底部にして、
    その周縁部に外周壁を設け、内側に空間を形成し
    てなるセラミツクス圧力検出素子と、該セラミツ
    クス圧力検出素子に電気的に接続する導体手段を
    備え、一端において該セラミツクス圧力検出素子
    の外周壁の前記底部とは反対側の端面を直接に若
    しくは間接的に押圧せしめる固定部材と、該セラ
    ミツクス圧力検出素子および該固定部材を収容す
    るハウジングと、前記固定部材の他端において該
    固定部材を前記セラミツクス圧力検出素子方向に
    押圧する押圧手段とを、備えていることを特徴と
    する圧力検出器。
JP1987132204U 1987-08-28 1987-08-28 Expired - Lifetime JPH0530122Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1987132204U JPH0530122Y2 (ja) 1987-08-28 1987-08-28
US07/234,571 US4916426A (en) 1987-08-28 1988-08-22 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987132204U JPH0530122Y2 (ja) 1987-08-28 1987-08-28

Publications (2)

Publication Number Publication Date
JPS6437636U true JPS6437636U (ja) 1989-03-07
JPH0530122Y2 JPH0530122Y2 (ja) 1993-08-02

Family

ID=15075826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987132204U Expired - Lifetime JPH0530122Y2 (ja) 1987-08-28 1987-08-28

Country Status (2)

Country Link
US (1) US4916426A (ja)
JP (1) JPH0530122Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004245782A (ja) * 2003-02-17 2004-09-02 Denso Corp 圧力検出装置
US7644252B2 (en) 2004-03-23 2010-01-05 Nec Corporation Multi-processor system and memory accessing method

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2549712B2 (ja) * 1988-07-27 1996-10-30 日本碍子株式会社 応力検出器
DE4206592A1 (de) * 1992-03-03 1993-09-09 Nowak Klaus Verfahren und vorrichtung zur leistungsmessung von motoren
US5406852A (en) * 1992-03-18 1995-04-18 Matsushita Electric Industrial Co., Ltd. Pressure sensor having a resistor element on a glass dryer with electrodes connected thereto
US5559280A (en) * 1994-11-14 1996-09-24 Eaton Corporation Combustion chamber pressure transducer and method of making same
DE10004614A1 (de) * 2000-02-03 2001-08-16 Siemens Ag Drucksensor zum Erfassen des Druckes einer Flüssigkeit
ITTO20121130A1 (it) * 2012-12-21 2014-06-22 Metallux Sa Sensore di pressione
US20150096369A1 (en) * 2013-10-04 2015-04-09 Ultra Analytical Group, LLC Apparatus, System and Method for Measuring the Properties of a Corrosive Liquid
US20150096804A1 (en) * 2013-10-04 2015-04-09 Ultra Analytical Group, LLC Apparatus, System and Method for Measuring the Properties of a Corrosive Liquid
EP2894450A1 (en) 2014-01-13 2015-07-15 Danfoss A/S A sensor for measuring fluid variables in a corrosive environment
US11243130B2 (en) * 2016-09-14 2022-02-08 National University Corporation Kobe University Force sensor and force sensor manufacturing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111873A (en) * 1978-02-21 1979-09-01 Nippon Denso Co Ltd Knocking detector for internal combustion engines

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4068206A (en) * 1976-06-25 1978-01-10 Midland-Ross Corporation Pressure-sensing semiconductor transducer
US4311980A (en) * 1978-10-12 1982-01-19 Fabrica Italiana Magneti Marelli, S.P.A. Device for pressure measurement using a resistor strain gauge
US4431981A (en) * 1982-09-22 1984-02-14 Chrysler Corporation Pressure unit assembly

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111873A (en) * 1978-02-21 1979-09-01 Nippon Denso Co Ltd Knocking detector for internal combustion engines

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004245782A (ja) * 2003-02-17 2004-09-02 Denso Corp 圧力検出装置
US7644252B2 (en) 2004-03-23 2010-01-05 Nec Corporation Multi-processor system and memory accessing method

Also Published As

Publication number Publication date
US4916426A (en) 1990-04-10
JPH0530122Y2 (ja) 1993-08-02

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