JPS6437862A - Manufacture of semiconductor integrated circuit - Google Patents
Manufacture of semiconductor integrated circuitInfo
- Publication number
- JPS6437862A JPS6437862A JP62194874A JP19487487A JPS6437862A JP S6437862 A JPS6437862 A JP S6437862A JP 62194874 A JP62194874 A JP 62194874A JP 19487487 A JP19487487 A JP 19487487A JP S6437862 A JPS6437862 A JP S6437862A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- epitaxial
- whole
- buried
- epitaxial layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 229910052787 antimony Inorganic materials 0.000 abstract 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 230000015556 catabolic process Effects 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 230000000149 penetrating effect Effects 0.000 abstract 1
Landscapes
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62194874A JPS6437862A (en) | 1987-08-04 | 1987-08-04 | Manufacture of semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62194874A JPS6437862A (en) | 1987-08-04 | 1987-08-04 | Manufacture of semiconductor integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437862A true JPS6437862A (en) | 1989-02-08 |
Family
ID=16331746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62194874A Pending JPS6437862A (en) | 1987-08-04 | 1987-08-04 | Manufacture of semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437862A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02215886A (ja) * | 1989-02-17 | 1990-08-28 | Taguchi Kenkyusho:Kk | 注入工法 |
-
1987
- 1987-08-04 JP JP62194874A patent/JPS6437862A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02215886A (ja) * | 1989-02-17 | 1990-08-28 | Taguchi Kenkyusho:Kk | 注入工法 |
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