JPS6438959A - Ion beam neutralization device - Google Patents

Ion beam neutralization device

Info

Publication number
JPS6438959A
JPS6438959A JP62195682A JP19568287A JPS6438959A JP S6438959 A JPS6438959 A JP S6438959A JP 62195682 A JP62195682 A JP 62195682A JP 19568287 A JP19568287 A JP 19568287A JP S6438959 A JPS6438959 A JP S6438959A
Authority
JP
Japan
Prior art keywords
split body
ion beam
split
voltage applied
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62195682A
Other languages
Japanese (ja)
Inventor
Yasushi Matsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62195682A priority Critical patent/JPS6438959A/en
Publication of JPS6438959A publication Critical patent/JPS6438959A/en
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To make it possible to neutralize ion beams uniformly even if they are asymmetrical and ununiform in shape by dividing electron extracting electrode and electronic energy control electrode into split bodies so as to enable application voltage to each split body to be controlled individually. CONSTITUTION:Electron extracting electrodes 17A-17G and electronic energy control electrodes 18A-18G consist of electrode split bodies which were divided into plural in the circumferential direction surrounding the orbit of an ion beam 10 and they enable voltage applied to each split body to be controlled individually. If voltage applied to a specific split body among each split body of the electron extracting electrodes 17A-17G is set higher than the voltage applied to other split bodies, the density of electron flow extracted and accelerated by the specific split body becomes high. Also, in regard to electronic energy control electrode 18A-18G, a current flow which passes through the specific split body similarly goes to the ion beam 10 holding high energy. Thus, the ion beam can be neutralized uniformly even if the sectional shape is ununiform or asymmetrical.
JP62195682A 1987-08-04 1987-08-04 Ion beam neutralization device Pending JPS6438959A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62195682A JPS6438959A (en) 1987-08-04 1987-08-04 Ion beam neutralization device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62195682A JPS6438959A (en) 1987-08-04 1987-08-04 Ion beam neutralization device

Publications (1)

Publication Number Publication Date
JPS6438959A true JPS6438959A (en) 1989-02-09

Family

ID=16345247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62195682A Pending JPS6438959A (en) 1987-08-04 1987-08-04 Ion beam neutralization device

Country Status (1)

Country Link
JP (1) JPS6438959A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5460432A (en) * 1993-03-29 1995-10-24 Kabushiki Kaisha Komotsu Seisakusho Cutter head for a tunnel excavator
KR100354992B1 (en) * 1996-08-02 2002-12-26 액셀리스 테크놀로지스, 인크. Method and apparatus for ion beam neutralization

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5460432A (en) * 1993-03-29 1995-10-24 Kabushiki Kaisha Komotsu Seisakusho Cutter head for a tunnel excavator
KR100354992B1 (en) * 1996-08-02 2002-12-26 액셀리스 테크놀로지스, 인크. Method and apparatus for ion beam neutralization

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