JPS6439764A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6439764A JPS6439764A JP62197472A JP19747287A JPS6439764A JP S6439764 A JPS6439764 A JP S6439764A JP 62197472 A JP62197472 A JP 62197472A JP 19747287 A JP19747287 A JP 19747287A JP S6439764 A JPS6439764 A JP S6439764A
- Authority
- JP
- Japan
- Prior art keywords
- suppressing agent
- radiation ray
- resist
- ray suppressing
- frame pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Memories (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To make it possible to fill a radiation ray suppressing agent into the desired arbitrary shape, and to prevent the generation of the breaking of wire caused by the adhesion of the radiation ray suppressing agent to a bonding wire by a method wherein a frame pattern is formed using the resist surrounding a memory part. CONSTITUTION:A high viscosity resist 4 is coated on the whole surface of the wafer on which a semiconductor functional element is formed. Then, using an exposing device and a developing device, a frame pattern 6 is formed surrounding a circuit part 5 including the region on a memory part. Subsequently, the resist 4 has been baked and hardened in an oven, a radiation ray suppressing agent 7 such as polyimide is filled up in the region surrounded by the frame pattern 6, the radiation ray suppressing agent 7 is scattered and solidified in the oven. Then, when the resist 4 is removed by a stripping device, a film of radiation ray suppressing agent 7 is formed on the main surface of a semiconductor substrate 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62197472A JPS6439764A (en) | 1987-08-06 | 1987-08-06 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62197472A JPS6439764A (en) | 1987-08-06 | 1987-08-06 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439764A true JPS6439764A (en) | 1989-02-10 |
Family
ID=16375048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62197472A Pending JPS6439764A (en) | 1987-08-06 | 1987-08-06 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439764A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04296029A (en) * | 1991-03-26 | 1992-10-20 | Nec Corp | Semiconductor integrated circuit device |
-
1987
- 1987-08-06 JP JP62197472A patent/JPS6439764A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04296029A (en) * | 1991-03-26 | 1992-10-20 | Nec Corp | Semiconductor integrated circuit device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6439764A (en) | Manufacture of semiconductor device | |
| JPS5794641A (en) | Manufacture of electric heater | |
| EP0319175A3 (en) | Method of forming a solid article | |
| JPH01292829A (en) | Manufacture of semiconductor device | |
| JP4015790B2 (en) | Manufacturing method of semiconductor device | |
| JPS57130437A (en) | Sealing method of ic | |
| JPS54104286A (en) | Integrated circuit device | |
| JPS5419658A (en) | Semiconductor device | |
| JPS5766651A (en) | Manufacture of semiconductor device | |
| JPS5587436A (en) | Method of producing semiconductor device | |
| JPS5587450A (en) | Manufacture of electronic device | |
| JPS5630738A (en) | Manufacture of semiconductor device | |
| JPS55138240A (en) | Manufacture of semiconductor device | |
| JPS6480057A (en) | Manufacture of circuit module | |
| JPS5694756A (en) | Semiconductor device | |
| JPS53108773A (en) | Production of semiconductor device | |
| JPS55117254A (en) | Fabrication of electronic device | |
| JPS53114365A (en) | Manufacture of semiconductor device | |
| JPS6421944A (en) | Manufacture of semiconductor device | |
| JPS5656654A (en) | Manufacture of semiconductor device | |
| JPS57102051A (en) | Manufacture of semiconductor device | |
| JPS5512773A (en) | Manufacturing method of semiconductor device | |
| JPS57202760A (en) | Semiconductor device | |
| JPS5399781A (en) | Manufacture of semiconductor integrated circuit device | |
| JPS5512775A (en) | Manufacturing method of semiconductor |