JPS6443370A - Spin coating device and spin coating method - Google Patents

Spin coating device and spin coating method

Info

Publication number
JPS6443370A
JPS6443370A JP62196822A JP19682287A JPS6443370A JP S6443370 A JPS6443370 A JP S6443370A JP 62196822 A JP62196822 A JP 62196822A JP 19682287 A JP19682287 A JP 19682287A JP S6443370 A JPS6443370 A JP S6443370A
Authority
JP
Japan
Prior art keywords
coated
materials
spin coating
mounts
recessed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62196822A
Other languages
English (en)
Inventor
Masahiko Ikeno
Hideo Saeki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62196822A priority Critical patent/JPS6443370A/ja
Publication of JPS6443370A publication Critical patent/JPS6443370A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP62196822A 1987-08-05 1987-08-05 Spin coating device and spin coating method Pending JPS6443370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62196822A JPS6443370A (en) 1987-08-05 1987-08-05 Spin coating device and spin coating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62196822A JPS6443370A (en) 1987-08-05 1987-08-05 Spin coating device and spin coating method

Publications (1)

Publication Number Publication Date
JPS6443370A true JPS6443370A (en) 1989-02-15

Family

ID=16364240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62196822A Pending JPS6443370A (en) 1987-08-05 1987-08-05 Spin coating device and spin coating method

Country Status (1)

Country Link
JP (1) JPS6443370A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007069313A1 (ja) * 2005-12-14 2007-06-21 Fujitsu Limited レジスト塗布方法
JP2007201048A (ja) * 2006-01-25 2007-08-09 Seiko Epson Corp 半導体基板処理装置及び半導体装置の製造方法
CN108212688A (zh) * 2018-03-22 2018-06-29 王磊 一种表面涂覆液体装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007069313A1 (ja) * 2005-12-14 2007-06-21 Fujitsu Limited レジスト塗布方法
JP2007201048A (ja) * 2006-01-25 2007-08-09 Seiko Epson Corp 半導体基板処理装置及び半導体装置の製造方法
CN108212688A (zh) * 2018-03-22 2018-06-29 王磊 一种表面涂覆液体装置

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