JPS64765A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS64765A JPS64765A JP15568487A JP15568487A JPS64765A JP S64765 A JPS64765 A JP S64765A JP 15568487 A JP15568487 A JP 15568487A JP 15568487 A JP15568487 A JP 15568487A JP S64765 A JPS64765 A JP S64765A
- Authority
- JP
- Japan
- Prior art keywords
- silicon layer
- polycrystalline silicon
- type polycrystalline
- self
- aligning manner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 6
- 239000012535 impurity Substances 0.000 abstract 4
- 239000003990 capacitor Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 230000003071 parasitic effect Effects 0.000 abstract 2
- 238000001459 lithography Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15568487A JPS64765A (en) | 1987-06-23 | 1987-06-23 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15568487A JPS64765A (en) | 1987-06-23 | 1987-06-23 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01765A JPH01765A (ja) | 1989-01-05 |
| JPS64765A true JPS64765A (en) | 1989-01-05 |
Family
ID=15611299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15568487A Pending JPS64765A (en) | 1987-06-23 | 1987-06-23 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64765A (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0297027A (ja) * | 1988-10-03 | 1990-04-09 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| US4992388A (en) * | 1989-12-10 | 1991-02-12 | Motorola, Inc. | Short channel IGFET process |
| US5134452A (en) * | 1990-04-03 | 1992-07-28 | Mitsubishi Denki Kabushiki Kaisha | MIS type FET semiconductor device with gate insulating layer having a high dielectric breakdown strength |
| US5371024A (en) * | 1988-09-30 | 1994-12-06 | Kabushiki Kaisha Toshiba | Semiconductor device and process for manufacturing the same |
| US5606152A (en) * | 1992-10-28 | 1997-02-25 | The Furukawa Electric Co., Ltd. | Multilayer insulated wire and a manufacturing method therefor |
| US8210643B2 (en) | 2007-05-14 | 2012-07-03 | Brother Kogyo Kabushiki Kaisha | Liquid droplet jetting apparatus |
-
1987
- 1987-06-23 JP JP15568487A patent/JPS64765A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5371024A (en) * | 1988-09-30 | 1994-12-06 | Kabushiki Kaisha Toshiba | Semiconductor device and process for manufacturing the same |
| JPH0297027A (ja) * | 1988-10-03 | 1990-04-09 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| US4992388A (en) * | 1989-12-10 | 1991-02-12 | Motorola, Inc. | Short channel IGFET process |
| US5134452A (en) * | 1990-04-03 | 1992-07-28 | Mitsubishi Denki Kabushiki Kaisha | MIS type FET semiconductor device with gate insulating layer having a high dielectric breakdown strength |
| US5606152A (en) * | 1992-10-28 | 1997-02-25 | The Furukawa Electric Co., Ltd. | Multilayer insulated wire and a manufacturing method therefor |
| US8210643B2 (en) | 2007-05-14 | 2012-07-03 | Brother Kogyo Kabushiki Kaisha | Liquid droplet jetting apparatus |
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