JPS64780A - Connection device and manufacture thereof - Google Patents

Connection device and manufacture thereof

Info

Publication number
JPS64780A
JPS64780A JP62155823A JP15582387A JPS64780A JP S64780 A JPS64780 A JP S64780A JP 62155823 A JP62155823 A JP 62155823A JP 15582387 A JP15582387 A JP 15582387A JP S64780 A JPS64780 A JP S64780A
Authority
JP
Japan
Prior art keywords
superconducting
trenches
ribbon
thin film
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62155823A
Other languages
Japanese (ja)
Other versions
JPH01780A (en
Inventor
Shuichi Kameyama
Takashi Uehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62-155823A priority Critical patent/JPH01780A/en
Priority claimed from JP62-155823A external-priority patent/JPH01780A/en
Publication of JPS64780A publication Critical patent/JPS64780A/en
Publication of JPH01780A publication Critical patent/JPH01780A/en
Pending legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To facilitate leading a current out to the direction of a plane parallel to a substrate by a method wherein trenches are formed in a ribbon-shape thin film made of Y-Ba-Cu-O system material and the current is lead out of the side surfaces of the trenches and to facilitate leading out a current out to the direction vertical to the plane by tapering the trenches.
CONSTITUTION: A ribbon-shape superconducting thin film made of Y-Ba-Cu-O system crystal is formed on a crystalline sapphire substrate 100 and etched by physical etching to form a ribbon-shape wiring 110 and further an insulating film 120 such as a silicon oxide film is formed over the whole surface. Then trenches 140A and 140B with nearly vertical side walls are formed by physical etching and a polycrystalline superconducting thin film 160 is deposited over the whole surface and resist patterns 180A, 180B and 180C are formed by a photoetching process. Then the superconducting thin film 160 is etched with the resist patterns 180A∼C as a mask by physical etching to form ribbon-shape superconducting wirings 160A, 160B and 160C and the resist patterns 180A∼C are removed. The superconducting wiring 160C passes above the superconducting wiring 110.
COPYRIGHT: (C)1989,JPO&Japio
JP62-155823A 1987-06-23 Connection body device and its manufacturing method Pending JPH01780A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62-155823A JPH01780A (en) 1987-06-23 Connection body device and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62-155823A JPH01780A (en) 1987-06-23 Connection body device and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS64780A true JPS64780A (en) 1989-01-05
JPH01780A JPH01780A (en) 1989-01-05

Family

ID=

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6471080A (en) * 1987-09-10 1989-03-16 Nec Corp Superconductive contact
JPH0277177A (en) * 1988-09-13 1990-03-16 Nec Corp Oxide superconductor wiring contact structure and its manufacturing method
JPH0332074A (en) * 1989-06-29 1991-02-12 Sumitomo Electric Ind Ltd superconducting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6471080A (en) * 1987-09-10 1989-03-16 Nec Corp Superconductive contact
JPH0277177A (en) * 1988-09-13 1990-03-16 Nec Corp Oxide superconductor wiring contact structure and its manufacturing method
JPH0332074A (en) * 1989-06-29 1991-02-12 Sumitomo Electric Ind Ltd superconducting device

Similar Documents

Publication Publication Date Title
JPS5687666A (en) Plasma etching method
JPS64780A (en) Connection device and manufacture thereof
JPS57204165A (en) Manufacture of charge coupling element
JPS643663A (en) Forming method for fine pattern
JPS57145340A (en) Manufacture of semiconductor device
JPS6430228A (en) Manufacture of semiconductor device
JPS5495185A (en) Production of semiconductor device
JPS6459936A (en) Manufacture of integrated circuit
JPS54162490A (en) Manufacture of semiconductor device
JPS5496363A (en) Electrode forming method for semiconductor device
JPS56114355A (en) Manufacture of semiconductor device
JPS559415A (en) Semiconductor manufacturing method
JPS57176769A (en) Semiconductor device and manufacture thereof
JPS5482973A (en) Electrode forming method for semiconductor device
JPS5546587A (en) Method of forming plasma growing film
JPS571243A (en) Manufacture of semiconductor device
JPS6420641A (en) Manufacture of semiconductor device
JPS6473718A (en) Manufacture of semiconductor integrated circuit device
JPS56156915A (en) Formation of multilayer film for electronic circuit
JPS64721A (en) Manufacture of single crystal thin-film
JPS5797629A (en) Manufacture of semiconductor device
JPS6411399A (en) Etching of thin film pattern
JPS6439027A (en) Formation of electrode
JPS5536926A (en) Manufacturing of semiconductor device
JPS6445141A (en) Manufacture of semiconductor device