JPS64781B2 - - Google Patents
Info
- Publication number
- JPS64781B2 JPS64781B2 JP58235776A JP23577683A JPS64781B2 JP S64781 B2 JPS64781 B2 JP S64781B2 JP 58235776 A JP58235776 A JP 58235776A JP 23577683 A JP23577683 A JP 23577683A JP S64781 B2 JPS64781 B2 JP S64781B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- exchange
- yoke
- bearing
- thrust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58235776A JPS60127646A (ja) | 1983-12-14 | 1983-12-14 | 真空装置の試料交換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58235776A JPS60127646A (ja) | 1983-12-14 | 1983-12-14 | 真空装置の試料交換装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60127646A JPS60127646A (ja) | 1985-07-08 |
| JPS64781B2 true JPS64781B2 (2) | 1989-01-09 |
Family
ID=16991068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58235776A Granted JPS60127646A (ja) | 1983-12-14 | 1983-12-14 | 真空装置の試料交換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60127646A (2) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1032224C2 (nl) * | 2006-07-21 | 2008-01-22 | Univ Delft Tech | Werkwijze voor sample preparatie voor cryo-elektronenmicroscopie (CEM), microreactor en laadperron. |
| JP5401408B2 (ja) * | 2010-07-20 | 2014-01-29 | 株式会社日立ハイテクノロジーズ | 荷電粒子応用装置 |
-
1983
- 1983-12-14 JP JP58235776A patent/JPS60127646A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60127646A (ja) | 1985-07-08 |
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