KR960031987A - 가스(gas) 센싱소자의 구조 및 제조방법 - Google Patents

가스(gas) 센싱소자의 구조 및 제조방법 Download PDF

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Publication number
KR960031987A
KR960031987A KR1019950003681A KR19950003681A KR960031987A KR 960031987 A KR960031987 A KR 960031987A KR 1019950003681 A KR1019950003681 A KR 1019950003681A KR 19950003681 A KR19950003681 A KR 19950003681A KR 960031987 A KR960031987 A KR 960031987A
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South Korea
Prior art keywords
sensing
electrode
gas
sensing film
film
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Ceased
Application number
KR1019950003681A
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English (en)
Inventor
윤동현
권철한
이규정
박현수
홍형기
신현우
김성태
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구자홍
Lg 전자주식회사
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Priority to KR1019950003681A priority Critical patent/KR960031987A/ko
Priority to US08/605,889 priority patent/US5627305A/en
Priority to JP8036961A priority patent/JP2788888B2/ja
Priority to CN96104036A priority patent/CN1141433A/zh
Publication of KR960031987A publication Critical patent/KR960031987A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

본 발명은 가스(GAS) 센싱소자에 관한 것으로, 특히 별도의 가열장치(heater)없이 감지막의 전류-전압특성을 이용하여 센싱동작이 이루어지도록 한 저전력의 상온동작형 가스 센싱소자의 구조 및 제조방법에 관한 것이다.
상기와 같은 본 발명의 가스 센싱소자의 구조는 기판상에 일정 패턴으로 형성되는 전극부와, 상기 전극부상에 형성되어 외부의 가스와 반응하는 감지막으로 구성된 가스센서부와, 상기 전극을 통하여 감지막에 전압을 인가하는 전압인가부와 상기 감지막의 가스반응에 의해 변화되는 전류값을 검출해내는 전류측정부를 포함하여 이루어지고, 본 발명의 가스 센싱 소자의 제조방법은 기판상에 Pt페이스트를 이용하여 스크린 프린팅법으로 특정 형태로 전극을 패터닝하여 소성하는 공정과, 상기 전극상에 혼합된 SnO2와 WO3분말과 유기 결합물을 포함하여 형성된 감지막 페이스트를 스크린 프린팅하여 감지막을 형성하는 공정과, 상기 감지막을 600℃에서 1시간 소성한 후 전극패드(pad)에 리드선(Lead Wire)을 연결하여 패키징(Packaging)하는 공정을 포함하여 이루어진다.

Description

가스(GAS) 센싱소자의 구조 및 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도(a)는 본 발명의 가스 센싱소자의 레이아웃도, (b)는 제2도 (a)의 A-A′선에 따른 구조 단면도.
제3도는 본 발명의 가스센싱소자의 동작회로도.
제4도 (a) (b) (c)는 본 발명의 가스 센싱소자의 동작특성도.

Claims (4)

  1. 기판상에 일정 패턴으로 형성되는 전극부와, 상기 전극부상에 형성되어 외부의 가스와 반응하는 감지막으로 구성된 가스센서부와, 상기 전극을 통하여 감지막에 전압을 인가하는 전압인가부와, 상기 감지막의 가스반응에 의해 변화되는 전류값을 검출해내는 전류측정부를 포함하여 구성됨을 특징으로 하는 가스 센싱소자의 구조.
  2. 기판상에 Pt페이스트를 이용하여 스크린 프린팅법으로 특정 형태로 전극을 패터닝하여 소성하는 공정과, 상기 전극상에 혼합된 SnO2와 WO3분말과 유기 결합물을 포함하여 형성된 감지막 페이스트를 스크린 프린팅하여 감지막을 형성하는 공정과, 상기 감지막을 600℃에서 1시간 소성한 후 전극패드(pad)에 리드선(Lead Wire)을 연결하여 패키징(Packaging)하는 공정을 포함하여 이루어짐을 특징으로 하는 가스센싱소자의 제조방법.
  3. 제2항에 있어서, 전극패터닝 후의 소성공정은 1100℃의 온도에서 1시간 진행되는 것을 특징으로 하는 가스센싱소자의 제조방법.
  4. 제2항에 있어서, 감지막 페이스트의 SnO2와 WO3분말의 혼합비율은 95 : 5wt%인 것을 특징으로 하는 가스 센싱소자의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950003681A 1995-02-24 1995-02-24 가스(gas) 센싱소자의 구조 및 제조방법 Ceased KR960031987A (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019950003681A KR960031987A (ko) 1995-02-24 1995-02-24 가스(gas) 센싱소자의 구조 및 제조방법
US08/605,889 US5627305A (en) 1995-02-24 1996-02-23 Gas sensing apparatus and method
JP8036961A JP2788888B2 (ja) 1995-02-24 1996-02-23 ガス感知装置及び感知方法
CN96104036A CN1141433A (zh) 1995-02-24 1996-02-24 气体检测仪及其方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950003681A KR960031987A (ko) 1995-02-24 1995-02-24 가스(gas) 센싱소자의 구조 및 제조방법

Publications (1)

Publication Number Publication Date
KR960031987A true KR960031987A (ko) 1996-09-17

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Country Status (4)

Country Link
US (1) US5627305A (ko)
JP (1) JP2788888B2 (ko)
KR (1) KR960031987A (ko)
CN (1) CN1141433A (ko)

Cited By (1)

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KR20030021612A (ko) * 2001-09-07 2003-03-15 박진성 이종접합 후막센서 및 그의 제조 방법

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GB9802940D0 (en) * 1998-02-11 1998-04-08 Cbl Ceramics Ltd Gas sensor
US7193187B2 (en) * 2004-02-09 2007-03-20 Advanced Technology Materials, Inc. Feedback control system and method for maintaining constant resistance operation of electrically heated elements
US7737700B2 (en) * 2005-11-23 2010-06-15 Ust Umweltsensortechnik Gmbh Arrangement and method for detecting air ingredients
US7827852B2 (en) * 2007-12-20 2010-11-09 General Electric Company Gas sensor and method of making
GB2464516A (en) * 2008-10-17 2010-04-21 Alireza Salehi Self heated carbon monoxide sensor
DE102010001624A1 (de) * 2010-02-05 2011-08-11 Robert Bosch GmbH, 70469 Verfahren zur Detektion von zwei oder mehr Gasspezies
TWI445958B (zh) * 2012-02-09 2014-07-21 Ind Tech Res Inst 氣體檢測系統、裝置及方法
US20140260545A1 (en) * 2013-03-15 2014-09-18 Infineon Technologies Ag Sensor and sensing method
DE102015200217A1 (de) * 2015-01-09 2016-07-14 Robert Bosch Gmbh Sensorvorrichtung und Verfahren zum Erfassen zumindest eines gasförmigen Analyten sowie Verfahren zum Herstellen einer Sensorvorrichtung
DE102016201193A1 (de) * 2016-01-27 2017-07-27 Technische Universität München Gedruckte Sensorvorrichtung zum Detektieren von Medien
CN105928981A (zh) * 2016-04-27 2016-09-07 上海翰临电子科技有限公司 一种全天候空气质量监测方法及监测设备
CN106018497B (zh) * 2016-07-18 2019-02-19 哈尔滨理工大学 一种半导体气体传感器低频温度调制检测方法
US10329022B2 (en) * 2016-10-31 2019-06-25 Honeywell International Inc. Adjustable sensor or sensor network to selectively enhance identification of select chemical species
CN107941895A (zh) * 2017-11-10 2018-04-20 中国人民解放军陆军防化学院 离子迁移谱检测仪
CN109682858B (zh) * 2018-12-19 2021-09-17 苏州慧闻纳米科技有限公司 一种利用气体传感器实时检测气体浓度的方法
KR102641207B1 (ko) * 2019-03-26 2024-02-28 엘지전자 주식회사 센서 모듈
CN113511646A (zh) * 2020-04-10 2021-10-19 中国石油化工股份有限公司 自加热气体传感器、气敏材料及其制备方法和应用
TWI800751B (zh) * 2020-09-18 2023-05-01 國立陽明交通大學 氣體感測方法及氣體感測系統
US12196698B2 (en) * 2022-11-10 2025-01-14 Tdk Corporation Metal oxide semiconductor gas sensor

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Also Published As

Publication number Publication date
US5627305A (en) 1997-05-06
JP2788888B2 (ja) 1998-08-20
CN1141433A (zh) 1997-01-29
JPH08261970A (ja) 1996-10-11

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