NL7303954A - - Google Patents

Info

Publication number: NL7303954A
Authority: NL; Netherlands

Application number

NL7303954A

Other versions

NL162313C (nl

NL162313B (nl

Original Assignee

Western Electric Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1972-03-22

Filing date

1973-03-21

Publication date

1973-09-25

1972-03-22 Priority claimed from US00237060A external-priority patent/US3808072A/en

1973-03-21 Application filed by Western Electric Co filed Critical Western Electric Co

1973-09-25 Publication of NL7303954A publication Critical patent/NL7303954A/xx

1979-12-17 Publication of NL162313B publication Critical patent/NL162313B/xx

1980-05-16 Application granted granted Critical

1980-05-16 Publication of NL162313C publication Critical patent/NL162313C/xx

Links

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
- H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
- H10P50/246—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group III-V materials
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/24—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
- H10P14/2901—Materials
- H10P14/2907—Materials being Group IIIA-VA materials
- H10P14/2911—Arsenides
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/32—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
- H10P14/3202—Materials thereof
- H10P14/3214—Materials thereof being Group IIIA-VA semiconductors
- H10P14/3221—Arsenides
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
- H10P14/3414—Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
- H10P14/3421—Arsenides
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3438—Doping during depositing
- H10P14/3441—Conductivity type
- H10P14/3442—N-type

NL7303954.A 1972-03-22 1973-03-21 Werkwijze voor het behandelen van een substraat van galliumarsenide. NL162313C (nl)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US00237060A US3808072A (en)	1972-03-22	1972-03-22	In situ etching of gallium arsenide during vapor phase growth of epitaxial gallium arsenide
US24931172A	1972-05-01	1972-05-01

Publications (3)

Publication Number	Publication Date
NL7303954A true NL7303954A (cs)	1973-09-25
NL162313B NL162313B (nl)	1979-12-17
NL162313C NL162313C (nl)	1980-05-16

Family

ID=26930348

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
NL7303958.A NL160989C (nl)	1972-03-22	1973-03-21	Schottky-keerlaagdiode en werkwijze voor het vervaar- digen daarvan.
NL7303954.A NL162313C (nl)	1972-03-22	1973-03-21	Werkwijze voor het behandelen van een substraat van galliumarsenide.

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
NL7303958.A NL160989C (nl)	1972-03-22	1973-03-21	Schottky-keerlaagdiode en werkwijze voor het vervaar- digen daarvan.

Country Status (6)

Country	Link
JP (2)	JPS5232831B2 (cs)
FR (2)	FR2176999B1 (cs)
GB (2)	GB1425101A (cs)
IT (2)	IT982897B (cs)
NL (2)	NL160989C (cs)
SE (2)	SE388972B (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5244582A (en) *	1975-10-06	1977-04-07	New Japan Radio Co Ltd	Semiconductor device and process for production of the same
JPS55114620A (en) *	1979-02-22	1980-09-04	Yoshio Kaneda	Driver's cab on tractor or the like
JPS56169331A (en) *	1980-05-30	1981-12-26	Nec Corp	Vapor phase etching method for compound semiconductor
JPS5770810A (en) *	1980-10-17	1982-05-01	Lion Corp	Cosmetic for hair
JPS60222410A (ja) *	1984-04-20	1985-11-07	Asahi Denka Kogyo Kk	シヤンプ−組成物

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4916231A (cs) *	1972-06-06	1974-02-13

1973
- 1973-03-09 SE SE7303348A patent/SE388972B/xx unknown
- 1973-03-09 SE SE7303347A patent/SE375557B/xx unknown
- 1973-03-16 IT IT48869/73A patent/IT982897B/it active
- 1973-03-16 IT IT48870/73A patent/IT979892B/it active
- 1973-03-21 FR FR7310134A patent/FR2176999B1/fr not_active Expired
- 1973-03-21 NL NL7303958.A patent/NL160989C/xx not_active IP Right Cessation
- 1973-03-21 FR FR7310133A patent/FR2176998B1/fr not_active Expired
- 1973-03-21 NL NL7303954.A patent/NL162313C/xx not_active IP Right Cessation
- 1973-03-22 GB GB1383973A patent/GB1425101A/en not_active Expired
- 1973-03-22 GB GB1384073A patent/GB1425102A/en not_active Expired
- 1973-03-22 JP JP48031933A patent/JPS5232831B2/ja not_active Expired
- 1973-05-10 JP JP5125473A patent/JPS5433711B2/ja not_active Expired

Also Published As

Publication number	Publication date
GB1425101A (en)	1976-02-18
FR2176999B1 (cs)	1978-03-03
FR2176998B1 (cs)	1976-11-05
DE2313768A1 (de)	1973-10-04
NL7303958A (cs)	1973-09-25
IT979892B (it)	1974-09-30
JPS5232831B2 (cs)	1977-08-24
JPS4948281A (cs)	1974-05-10
SE375557B (cs)	1975-04-21
DE2313768B2 (de)	1975-11-20
GB1425102A (en)	1976-02-18
JPS5019367A (cs)	1975-02-28
JPS5433711B2 (cs)	1979-10-22
NL160989B (nl)	1979-07-16
NL160989C (nl)	1979-12-17
IT982897B (it)	1974-10-21
FR2176999A1 (cs)	1973-11-02
NL162313C (nl)	1980-05-16
SE388972B (sv)	1976-10-18
NL162313B (nl)	1979-12-17
FR2176998A1 (cs)	1973-11-02

Legal Events

Date	Code	Title	Description
1987-11-16	V1	Lapsed because of non-payment of the annual fee

Publication	Publication Date	Title
CS158170B2 (cs)	1974-10-15
JPS4947220A (cs)	1974-05-07
FR2176999B1 (cs)	1978-03-03
JPS4927489A (cs)	1974-03-11
JPS4947995A (cs)	1974-05-09
JPS4916231A (cs)	1974-02-13
JPS4897114A (cs)	1973-12-11
JPS4996466U (cs)	1974-08-20
JPS4955127A (cs)	1974-05-29
JPS5327457Y2 (cs)	1978-07-12
JPS5216440B2 (cs)	1977-05-09
CS157307B1 (cs)	1974-09-16
JPS48112173U (cs)	1973-12-22
JPS49100347U (cs)	1974-08-29
JPS4957632A (cs)	1974-06-04
JPS4882065A (cs)	1973-11-02
JPS4894040A (cs)	1973-12-04
CS160339B1 (cs)	1975-03-28
JPS48109653U (cs)	1973-12-17
JPS4949436U (cs)	1974-04-30
CS156971B1 (cs)	1974-08-23
JPS4984034A (cs)	1974-08-13
CH569197A5 (cs)	1975-11-14
CH559015A5 (cs)	1975-02-28
CH591465A5 (cs)	1977-09-15