NO932203L - Fremgangsmaate og anordning til optimal avsoekning av en todimensjonal overflate paa en eller flere gjenstander - Google Patents

Fremgangsmaate og anordning til optimal avsoekning av en todimensjonal overflate paa en eller flere gjenstander

Info

Publication number
NO932203L
NO932203L NO932203A NO932203A NO932203L NO 932203 L NO932203 L NO 932203L NO 932203 A NO932203 A NO 932203A NO 932203 A NO932203 A NO 932203A NO 932203 L NO932203 L NO 932203L
Authority
NO
Norway
Prior art keywords
objects
articles
probe
dimensional surface
scanning
Prior art date
Application number
NO932203A
Other languages
English (en)
Other versions
NO932203D0 (no
Inventor
Sherman Poultney
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NO932203D0 publication Critical patent/NO932203D0/no
Publication of NO932203L publication Critical patent/NO932203L/no

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching for microworking, e. g. etching of gratings or trimming of electrical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20221—Translation
    • H01J2237/20228—Mechanical X-Y scanning

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

En anordning til optimal avsøkning av en overflate på en eller flere gjenstander f.eks. en eller flere halvlederskiver som er underkastet en kjemisk etse- prosess, har innretninger (14,15) for innstilling av en eller flere gjenstander f.eks. halvlederskiver (10) på en skiveholder (50). Videre omfatter den en sonde (18) til kjemisk etsing av gjenstandene (10). Holderen (50) har et underlag (12) som gjenstanden eller gjenstandene (10) hviler på, og det finnes anordninger (50,52,60) som setter skiveholder og sonde i innbyrdes bevegelse på en slik måte at sonden (18) felger en spiralformet bane over gjenstanden eller gjenstandene (10) for å tildanne overflaten på gjenstandene slik at disse svarer til en ønsket tykkelse. En fremgangsmåte til avsøkning av overflaten av en eller flere gjenstander er også beskrevet.
NO932203A 1992-06-16 1993-06-15 Fremgangsmaate og anordning til optimal avsoekning av en todimensjonal overflate paa en eller flere gjenstander NO932203L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/899,419 US5282921A (en) 1992-06-16 1992-06-16 Apparatus and method for optimally scanning a two-dimensional surface of one or more objects

Publications (2)

Publication Number Publication Date
NO932203D0 NO932203D0 (no) 1993-06-15
NO932203L true NO932203L (no) 1993-12-17

Family

ID=25410933

Family Applications (1)

Application Number Title Priority Date Filing Date
NO932203A NO932203L (no) 1992-06-16 1993-06-15 Fremgangsmaate og anordning til optimal avsoekning av en todimensjonal overflate paa en eller flere gjenstander

Country Status (6)

Country Link
US (2) US5282921A (no)
EP (1) EP0579380A1 (no)
JP (1) JPH0653178A (no)
IL (1) IL106018A (no)
NO (1) NO932203L (no)
TW (1) TW234785B (no)

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EP0668614A3 (en) * 1994-02-18 1996-03-27 Hughes Aircraft Co Method to improve the absolute thickness variation over a slice.
DE4432304C2 (de) * 1994-09-10 1996-10-17 Forschungszentrum Juelich Gmbh Verfahren zum Scannen einer Probenoberfläche mit einer Rastersonde eines Rastersondenmikroskops
US5811021A (en) * 1995-02-28 1998-09-22 Hughes Electronics Corporation Plasma assisted chemical transport method and apparatus
US6139678A (en) 1997-11-20 2000-10-31 Trusi Technologies, Llc Plasma processing methods and apparatus
JP4212707B2 (ja) * 1998-11-26 2009-01-21 スピードファム株式会社 ウエハ平坦化システム及びウエハ平坦化方法
US6287976B1 (en) 1999-05-19 2001-09-11 Tru-Si Technologies, Inc. Plasma processing methods and apparatus
US6749764B1 (en) * 2000-11-14 2004-06-15 Tru-Si Technologies, Inc. Plasma processing comprising three rotational motions of an article being processed
US6500681B1 (en) * 2002-01-11 2002-12-31 Advanced Micro Devices, Inc. Run-to-run etch control by feeding forward measured metal thickness
DE10320143A1 (de) 2003-05-06 2004-12-16 Pari GmbH Spezialisten für effektive Inhalation Vernebleranschlussvorrichtung für Beatmungsgeräte oder dergleichen
US6991948B2 (en) * 2003-11-05 2006-01-31 Solid State Measurements, Inc. Method of electrical characterization of a silicon-on-insulator (SOI) wafer
WO2008011903A1 (en) * 2006-07-28 2008-01-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Apparatus and method for processing a wafer
TWI401426B (zh) * 2008-02-15 2013-07-11 Veeco Instr Inc 用於批次非接觸式材料特性化之裝置及方法
US8022372B2 (en) 2008-02-15 2011-09-20 Veeco Instruments Inc. Apparatus and method for batch non-contact material characterization
TWI525744B (zh) 2011-05-31 2016-03-11 維克儀器公司 加熱之晶圓載體輪廓勘測
JP6366704B2 (ja) 2013-06-24 2018-08-01 ディーシージー システムズ、 インコーポレイテッドＤｃｇ Ｓｙｓｔｅｍｓ Ｉｎｃ． 局所的な試料の特性によって制御されるプロービングの適応モードを備えたプロービングを利用したデータ収集システム
US9287085B2 (en) * 2014-05-12 2016-03-15 Varian Semiconductor Equipment Associates, Inc. Processing apparatus and method of treating a substrate
CN107004554B (zh) 2014-06-25 2019-06-04 Fei埃法有限公司 使用在线纳米探测的贯穿工艺流程的芯片内和芯片间的电分析和过程控制

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2967907A (en) * 1952-06-02 1961-01-10 Hogan Faximile Corp Continuous facsimile scanning apparatus
US2912497A (en) * 1955-12-21 1959-11-10 Western Union Telegraph Co Optical scanner
US3806643A (en) * 1966-09-01 1974-04-23 Battelle Development Corp Photographic records of digital information and playback systems including optical scanners
US3993909A (en) * 1973-03-16 1976-11-23 U.S. Philips Corporation Substrate holder for etching thin films
JPS55104057A (en) * 1979-02-02 1980-08-09 Hitachi Ltd Ion implantation device
US4423137A (en) * 1980-10-28 1983-12-27 Quixote Corporation Contact printing and etching method of making high density recording medium
US4509162A (en) * 1980-10-28 1985-04-02 Quixote Corporation High density recording medium
JPS57161641A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
US4668366A (en) * 1984-08-02 1987-05-26 The Perkin-Elmer Corporation Optical figuring by plasma assisted chemical transport and etching apparatus therefor
JPH07114226B2 (ja) * 1986-10-28 1995-12-06 東京エレクトロン株式会社 プローブ装置及びプロービング方法
JPH0480919A (ja) * 1990-07-24 1992-03-13 Sony Corp プラズマ診断装置
JPH0499626A (ja) * 1990-08-17 1992-03-31 Ishizaka Shoji Kk 捺染スクリーンの製造方法
JPH0834198B2 (ja) * 1990-11-28 1996-03-29 信越半導体株式会社 Ｓｏｉ基板における単結晶薄膜層の膜厚制御方法
US5254830A (en) * 1991-05-07 1993-10-19 Hughes Aircraft Company System for removing material from semiconductor wafers using a contained plasma

Also Published As

Publication number Publication date
IL106018A0 (en) 1993-10-20
JPH0653178A (ja) 1994-02-25
US5312510A (en) 1994-05-17
NO932203D0 (no) 1993-06-15
IL106018A (en) 1995-03-30
EP0579380A1 (en) 1994-01-19
TW234785B (no) 1994-11-21
US5282921A (en) 1994-02-01

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