TR200003368T2 - Alt-tabakaların bakırla kaplanması için işlem - Google Patents

Alt-tabakaların bakırla kaplanması için işlem

Info

Publication number
TR200003368T2
TR200003368T2 TR2000/03368T TR200003368T TR200003368T2 TR 200003368 T2 TR200003368 T2 TR 200003368T2 TR 2000/03368 T TR2000/03368 T TR 2000/03368T TR 200003368 T TR200003368 T TR 200003368T TR 200003368 T2 TR200003368 T2 TR 200003368T2
Authority
TR
Turkey
Prior art keywords
substrates
copper coating
virgin
separate tank
coating
Prior art date
Application number
TR2000/03368T
Other languages
English (en)
Inventor
Hupe J�Rgen
Kronenberg Walter
Breitkreuz Eugen
Schmergel Ulrich
Original Assignee
Blasberg Oberflachentechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Blasberg Oberflachentechnik Gmbh filed Critical Blasberg Oberflachentechnik Gmbh
Publication of TR200003368T2 publication Critical patent/TR200003368T2/tr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • C25D21/14—Controlled addition of electrolyte components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing of the conductive pattern
    • H05K3/241—Reinforcing of the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Automation & Control Theory (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Optical Integrated Circuits (AREA)
  • ing And Chemical Polishing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

Tükenen bakir iyonlarinin ayrica tazelenmesi ile asidik bakir banyolari içinde çözünmeyen anodlar kullanilarak alt-tabakalarin bakirla kaplanmasi için bir islem olup, bu islemin özelligi, bakir iyonlarinin büyük kisminin dogrudan bakir karbonat ve/veya bazik bakir karbonat biçiminde saglanmasi, islem elektrolitine göre bir atlatma tarzinda çalistirilan ayri bir tank içinde diyaframlar ve yardimci elektrolitler ile dagitilmasi, gaz halindeki CO2'nin bahsedilen ayri tank içinde ayrilmasidir.
TR2000/03368T 1998-05-16 1999-05-14 Alt-tabakaların bakırla kaplanması için işlem TR200003368T2 (tr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19822076 1998-05-16

Publications (1)

Publication Number Publication Date
TR200003368T2 true TR200003368T2 (tr) 2001-04-20

Family

ID=7868038

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2000/03368T TR200003368T2 (tr) 1998-05-16 1999-05-14 Alt-tabakaların bakırla kaplanması için işlem

Country Status (22)

Country Link
US (1) US6576111B1 (tr)
EP (1) EP1080252B1 (tr)
JP (1) JP2002515549A (tr)
KR (1) KR100545664B1 (tr)
CN (1) CN1170965C (tr)
AT (1) ATE221930T1 (tr)
AU (1) AU4261799A (tr)
CA (1) CA2331750A1 (tr)
DE (1) DE59902276D1 (tr)
DK (1) DK1080252T3 (tr)
HU (1) HUP0102016A3 (tr)
IL (1) IL139418A0 (tr)
IS (1) IS5703A (tr)
NO (1) NO20005777L (tr)
PL (1) PL344529A1 (tr)
RO (1) RO119838B1 (tr)
RU (1) RU2222643C2 (tr)
SK (1) SK16912000A3 (tr)
TR (1) TR200003368T2 (tr)
WO (1) WO1999060188A2 (tr)
YU (1) YU70900A (tr)
ZA (1) ZA200006624B (tr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3725083B2 (ja) * 2002-02-21 2005-12-07 アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング メッキ設備における金属イオン供給源の有効保存を可能とする方法
US7776741B2 (en) 2008-08-18 2010-08-17 Novellus Systems, Inc. Process for through silicon via filing
US9109295B2 (en) * 2009-10-12 2015-08-18 Novellus Systems, Inc. Electrolyte concentration control system for high rate electroplating
US10472730B2 (en) 2009-10-12 2019-11-12 Novellus Systems, Inc. Electrolyte concentration control system for high rate electroplating
WO2016208609A1 (ja) * 2015-06-26 2016-12-29 住友金属鉱山株式会社 導電性基板
US10692735B2 (en) 2017-07-28 2020-06-23 Lam Research Corporation Electro-oxidative metal removal in through mask interconnect fabrication

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU60230A1 (ru) * 1939-06-25 1940-11-30 М.И. Бердников Способ электролитического осаждени меди на железе и других металлах
SU116447A1 (ru) * 1958-06-11 1958-11-30 А.М. Ямпольский Способ нанесени медных покрытий электролизом нецианистых электролитов
DE3483078D1 (de) 1983-09-28 1990-10-04 Blasberg Oberflaechentech Saures galvanisches kupferbad und verfahren zu seiner herstellung.
JPS62112996A (ja) * 1985-11-11 1987-05-23 Mitsubishi Metal Corp 伝熱体
DE4001960A1 (de) 1990-01-24 1991-07-25 Roland Schnetteler Verfahren zum elektrochemischen beschichten von stahlbaendern mit zink-nickellegierungen
JPH04320088A (ja) * 1991-04-18 1992-11-10 Cmk Corp プリント配線板の製造方法
JPH08501827A (ja) * 1992-09-15 1996-02-27 エイティアール ワイアー アンド ケーブル カンパニー，インコーポレイテッド 銅の電解メッキ方法及び装置

Also Published As

Publication number Publication date
CA2331750A1 (en) 1999-11-25
EP1080252B1 (de) 2002-08-07
ATE221930T1 (de) 2002-08-15
HUP0102016A2 (hu) 2001-09-28
YU70900A (sh) 2003-02-28
RO119838B1 (ro) 2005-04-29
KR100545664B1 (ko) 2006-01-24
AU4261799A (en) 1999-12-06
JP2002515549A (ja) 2002-05-28
IS5703A (is) 2000-11-02
DK1080252T3 (da) 2003-01-06
RU2222643C2 (ru) 2004-01-27
SK16912000A3 (sk) 2001-08-06
IL139418A0 (en) 2001-11-25
HUP0102016A3 (en) 2002-03-28
CN1301313A (zh) 2001-06-27
ZA200006624B (en) 2001-06-01
WO1999060188A2 (de) 1999-11-25
US6576111B1 (en) 2003-06-10
WO1999060188A3 (de) 2000-01-13
NO20005777D0 (no) 2000-11-15
PL344529A1 (en) 2001-11-05
CN1170965C (zh) 2004-10-13
KR20010043597A (ko) 2001-05-25
DE59902276D1 (de) 2002-09-12
NO20005777L (no) 2000-11-15
EP1080252A1 (de) 2001-03-07

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