ZA807242B - A nozzle for the continuous depositing of a layer of solid material on a substrate - Google Patents

A nozzle for the continuous depositing of a layer of solid material on a substrate

Info

Publication number
ZA807242B
ZA807242B ZA00807242A ZA807242A ZA807242B ZA 807242 B ZA807242 B ZA 807242B ZA 00807242 A ZA00807242 A ZA 00807242A ZA 807242 A ZA807242 A ZA 807242A ZA 807242 B ZA807242 B ZA 807242B
Authority
ZA
South Africa
Prior art keywords
nozzle
substrate
layer
solid material
continuous depositing
Prior art date
Application number
ZA00807242A
Other languages
English (en)
Inventor
R Kalbskopf
O Baumberger
Original Assignee
Siv Soc Italiana Vetro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siv Soc Italiana Vetro filed Critical Siv Soc Italiana Vetro
Publication of ZA807242B publication Critical patent/ZA807242B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/212—TiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nozzles (AREA)
  • Chemical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
ZA00807242A 1979-11-21 1980-11-20 A nozzle for the continuous depositing of a layer of solid material on a substrate ZA807242B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1037779 1979-11-21

Publications (1)

Publication Number Publication Date
ZA807242B true ZA807242B (en) 1981-11-25

Family

ID=4362579

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA00807242A ZA807242B (en) 1979-11-21 1980-11-20 A nozzle for the continuous depositing of a layer of solid material on a substrate

Country Status (16)

Country Link
US (1) US4361284A (de)
EP (1) EP0029809B1 (de)
JP (1) JPS5687451A (de)
KR (2) KR830004448A (de)
AU (1) AU544964B2 (de)
CA (1) CA1150749A (de)
CS (1) CS274255B2 (de)
DD (1) DD154584A5 (de)
DE (1) DE3066643D1 (de)
ES (1) ES497005A0 (de)
IT (1) IT1134153B (de)
MX (1) MX153336A (de)
PL (1) PL129254B1 (de)
SU (1) SU1187705A3 (de)
TR (1) TR21534A (de)
ZA (1) ZA807242B (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643469A5 (fr) * 1981-12-22 1984-06-15 Siv Soc Italiana Vetro Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide.
US4524718A (en) * 1982-11-22 1985-06-25 Gordon Roy G Reactor for continuous coating of glass
EP0162842A1 (de) * 1983-12-01 1985-12-04 Shatterproof Glass Corporation Gasverteilungsvorrichtung für eine zerstäubungskathode
US4928627A (en) * 1985-12-23 1990-05-29 Atochem North America, Inc. Apparatus for coating a substrate
EP0276796B1 (de) * 1987-01-27 1992-04-08 Asahi Glass Company Ltd. Gaszuführungsrohr für die reaktive Abscheidung aus der Gasphase
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass
US5136975A (en) * 1990-06-21 1992-08-11 Watkins-Johnson Company Injector and method for delivering gaseous chemicals to a surface
DE4103413C1 (de) * 1991-02-05 1992-11-12 Gunter M. 8918 Diessen De Voss
US6379466B1 (en) * 1992-01-17 2002-04-30 Applied Materials, Inc. Temperature controlled gas distribution plate
FR2724923B1 (fr) * 1994-09-27 1996-12-20 Saint Gobain Vitrage Technique de depot de revetements par pyrolyse de composition de gaz precurseur(s)
JP3836217B2 (ja) * 1997-05-21 2006-10-25 株式会社ベルデックス 封止液供給器具および方法
JP5519105B2 (ja) * 2004-08-02 2014-06-11 ビーコ・インストゥルメンツ・インコーポレイテッド 化学気相成長の方法及び化学気相成長リアクタ用のガス供給システム
DE102006043542B4 (de) * 2006-09-12 2012-05-16 Innovent E.V. Verfahren zum Beschichten von Oberflächen
DE102006043543B4 (de) * 2006-09-12 2012-05-10 Innovent E.V. Homogenisator für der Beschichtung von Oberflächen dienende Gasströme
EP2097153B1 (de) * 2006-12-28 2017-02-22 Korea Institute of Industrial Technology Herstellungsverfahren für filtermedien für mittel- und hochtemperaturabgas über eine schaumstoffbeschichtungstechnologie
JP5116313B2 (ja) * 2007-02-07 2013-01-09 東洋刃物株式会社 塗布ヘッド
TW201011114A (en) * 2008-05-19 2010-03-16 Du Pont Apparatus and method of vapor coating in an electronic device
WO2013019285A2 (en) * 2011-03-23 2013-02-07 Pilkington Group Limited Apparatus for depositing thin film coatings and method of deposition utilizing such apparatus
CN102921600B (zh) * 2012-11-30 2016-04-06 贵州贵航汽车零部件股份有限公司 涂油机涂油装置
MY201789A (en) * 2017-10-26 2024-03-18 First Solar Inc Systems and methods for vaporization and vapor distribution
KR102786474B1 (ko) * 2022-03-31 2025-03-27 참엔지니어링(주) 노즐형 증착장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3511703A (en) * 1963-09-20 1970-05-12 Motorola Inc Method for depositing mixed oxide films containing aluminum oxide
GB1282866A (en) 1968-08-16 1972-07-26 Pilkington Brothers Ltd Improvements in or relating to the production of glass having desired surface characteristics
CH544156A (de) 1971-04-16 1973-11-15 Bbc Brown Boveri & Cie Verfahren zur Herstellung von oxydischen Halbleiterschichten und Vorrichtung zur Durchführung des Verfahrens
US3970037A (en) * 1972-12-15 1976-07-20 Ppg Industries, Inc. Coating composition vaporizer
GB1516032A (en) 1976-04-13 1978-06-28 Bfg Glassgroup Coating of glass
US4270702A (en) * 1978-04-26 1981-06-02 Albany International Corp. Adjustable orifice air knife
CH628600A5 (fr) * 1979-02-14 1982-03-15 Siv Soc Italiana Vetro Procede pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide et installation pour la mise en oeuvre de ce procede.

Also Published As

Publication number Publication date
SU1187705A3 (ru) 1985-10-23
PL129254B1 (en) 1984-04-30
CS797580A2 (en) 1990-09-12
JPS6148988B2 (de) 1986-10-27
IT8025742A0 (it) 1980-11-03
IT1134153B (it) 1986-07-31
PL227980A1 (de) 1981-09-04
AU544964B2 (en) 1985-06-27
MX153336A (es) 1986-09-22
JPS5687451A (en) 1981-07-16
ES8107052A1 (es) 1981-10-01
DE3066643D1 (en) 1984-03-22
KR830004448A (ko) 1983-07-13
EP0029809A1 (de) 1981-06-03
KR860000024Y1 (ko) 1986-01-30
CA1150749A (fr) 1983-07-26
EP0029809B1 (de) 1984-02-15
AU6440480A (en) 1981-05-28
US4361284A (en) 1982-11-30
CS274255B2 (en) 1991-04-11
ES497005A0 (es) 1981-10-01
TR21534A (tr) 1984-08-22
DD154584A5 (de) 1982-04-07

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