AT336974B - Atzflussigkeit fur aluminium - Google Patents

Atzflussigkeit fur aluminium

Info

Publication number
AT336974B
AT336974B AT672375A AT672375A AT336974B AT 336974 B AT336974 B AT 336974B AT 672375 A AT672375 A AT 672375A AT 672375 A AT672375 A AT 672375A AT 336974 B AT336974 B AT 336974B
Authority
AT
Austria
Prior art keywords
aluminum
reset liquid
reset
liquid
Prior art date
Application number
AT672375A
Other languages
German (de)
English (en)
Other versions
ATA672375A (de
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of ATA672375A publication Critical patent/ATA672375A/de
Application granted granted Critical
Publication of AT336974B publication Critical patent/AT336974B/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/66—Wet etching of conductive or resistive materials
    • H10P50/663—Wet etching of conductive or resistive materials by chemical means only
    • H10P50/667—Wet etching of conductive or resistive materials by chemical means only by liquid etching only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/36—Alkaline compositions for etching aluminium or alloys thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
AT672375A 1974-09-03 1975-09-01 Atzflussigkeit fur aluminium AT336974B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7411645A NL7411645A (nl) 1974-09-03 1974-09-03 Etsvloeistof voor aluminium.

Publications (2)

Publication Number Publication Date
ATA672375A ATA672375A (de) 1976-09-15
AT336974B true AT336974B (de) 1977-06-10

Family

ID=19822017

Family Applications (1)

Application Number Title Priority Date Filing Date
AT672375A AT336974B (de) 1974-09-03 1975-09-01 Atzflussigkeit fur aluminium

Country Status (11)

Country Link
JP (1) JPS5150834A (fr)
AT (1) AT336974B (fr)
BE (1) BE832966A (fr)
CA (1) CA1055823A (fr)
CH (1) CH616708A5 (fr)
DE (1) DE2537154A1 (fr)
FR (1) FR2283943A1 (fr)
GB (1) GB1499037A (fr)
IT (1) IT1042185B (fr)
NL (1) NL7411645A (fr)
SE (1) SE7509691L (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047588C2 (de) * 1980-12-17 1984-07-12 Siemens AG, 1000 Berlin und 8000 München Ätzflüssigkeit für Aufdampfschichten und Verfahren zur Ätzung von Dünnfilmstrukturen
US4425183A (en) * 1983-08-08 1984-01-10 Ncr Corporation Metal bevel process for multi-level metal semiconductor applications

Also Published As

Publication number Publication date
JPS5150834A (fr) 1976-05-04
NL7411645A (nl) 1976-03-05
FR2283943A1 (fr) 1976-04-02
CH616708A5 (en) 1980-04-15
DE2537154A1 (de) 1976-03-18
FR2283943B1 (fr) 1980-09-12
GB1499037A (en) 1978-01-25
ATA672375A (de) 1976-09-15
BE832966A (fr) 1976-03-01
CA1055823A (fr) 1979-06-05
IT1042185B (it) 1980-01-30
SE7509691L (sv) 1976-03-04

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