NL7411645A - Etsvloeistof voor aluminium. - Google Patents

Etsvloeistof voor aluminium.

Info

Publication number
NL7411645A
NL7411645A NL7411645A NL7411645A NL7411645A NL 7411645 A NL7411645 A NL 7411645A NL 7411645 A NL7411645 A NL 7411645A NL 7411645 A NL7411645 A NL 7411645A NL 7411645 A NL7411645 A NL 7411645A
Authority
NL
Netherlands
Prior art keywords
aluminum
etching liquid
etching
liquid
Prior art date
Application number
NL7411645A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7411645A priority Critical patent/NL7411645A/xx
Priority to DE19752537154 priority patent/DE2537154A1/de
Priority to GB35733/75A priority patent/GB1499037A/en
Priority to CA234,469A priority patent/CA1055823A/fr
Priority to IT26749/75A priority patent/IT1042185B/it
Priority to JP50105568A priority patent/JPS5150834A/ja
Priority to CH1127575A priority patent/CH616708A5/de
Priority to SE7509691A priority patent/SE7509691L/xx
Priority to BE159656A priority patent/BE832966A/fr
Priority to AT672375A priority patent/AT336974B/de
Priority to FR7526841A priority patent/FR2283943A1/fr
Publication of NL7411645A publication Critical patent/NL7411645A/xx
Priority to US05/792,641 priority patent/US4097394A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/66—Wet etching of conductive or resistive materials
    • H10P50/663—Wet etching of conductive or resistive materials by chemical means only
    • H10P50/667—Wet etching of conductive or resistive materials by chemical means only by liquid etching only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/36—Alkaline compositions for etching aluminium or alloys thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
NL7411645A 1974-09-03 1974-09-03 Etsvloeistof voor aluminium. NL7411645A (nl)

Priority Applications (12)

Application Number Priority Date Filing Date Title
NL7411645A NL7411645A (nl) 1974-09-03 1974-09-03 Etsvloeistof voor aluminium.
DE19752537154 DE2537154A1 (de) 1974-09-03 1975-08-21 Aetzfluessigkeit fuer aluminium.
GB35733/75A GB1499037A (en) 1974-09-03 1975-08-29 Etchant suitable for etching aluminium
CA234,469A CA1055823A (fr) 1974-09-03 1975-08-29 Eau-forte pour graver l'aluminium
IT26749/75A IT1042185B (it) 1974-09-03 1975-08-29 Liquido di attacco per l attacco chimico di alluminio
JP50105568A JPS5150834A (fr) 1974-09-03 1975-08-30
CH1127575A CH616708A5 (en) 1974-09-03 1975-09-01 Etching fluid for aluminium or aluminium alloys.
SE7509691A SE7509691L (sv) 1974-09-03 1975-09-01 Etsvetska for etsning av aluminium
BE159656A BE832966A (fr) 1974-09-03 1975-09-01 Liquide de decapage pour de l'aluminium
AT672375A AT336974B (de) 1974-09-03 1975-09-01 Atzflussigkeit fur aluminium
FR7526841A FR2283943A1 (fr) 1974-09-03 1975-09-02 Liquide de decapage pour de l'aluminium
US05/792,641 US4097394A (en) 1974-09-03 1977-05-02 Etching liquid for etching aluminum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7411645A NL7411645A (nl) 1974-09-03 1974-09-03 Etsvloeistof voor aluminium.

Publications (1)

Publication Number Publication Date
NL7411645A true NL7411645A (nl) 1976-03-05

Family

ID=19822017

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7411645A NL7411645A (nl) 1974-09-03 1974-09-03 Etsvloeistof voor aluminium.

Country Status (11)

Country Link
JP (1) JPS5150834A (fr)
AT (1) AT336974B (fr)
BE (1) BE832966A (fr)
CA (1) CA1055823A (fr)
CH (1) CH616708A5 (fr)
DE (1) DE2537154A1 (fr)
FR (1) FR2283943A1 (fr)
GB (1) GB1499037A (fr)
IT (1) IT1042185B (fr)
NL (1) NL7411645A (fr)
SE (1) SE7509691L (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047588C2 (de) * 1980-12-17 1984-07-12 Siemens AG, 1000 Berlin und 8000 München Ätzflüssigkeit für Aufdampfschichten und Verfahren zur Ätzung von Dünnfilmstrukturen
US4425183A (en) * 1983-08-08 1984-01-10 Ncr Corporation Metal bevel process for multi-level metal semiconductor applications

Also Published As

Publication number Publication date
AT336974B (de) 1977-06-10
DE2537154A1 (de) 1976-03-18
SE7509691L (sv) 1976-03-04
BE832966A (fr) 1976-03-01
JPS5150834A (fr) 1976-05-04
GB1499037A (en) 1978-01-25
IT1042185B (it) 1980-01-30
FR2283943A1 (fr) 1976-04-02
CH616708A5 (en) 1980-04-15
FR2283943B1 (fr) 1980-09-12
ATA672375A (de) 1976-09-15
CA1055823A (fr) 1979-06-05

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Legal Events

Date Code Title Description
BV The patent application has lapsed