CA1055823A - Eau-forte pour graver l'aluminium - Google Patents

Eau-forte pour graver l'aluminium

Info

Publication number
CA1055823A
CA1055823A CA234,469A CA234469A CA1055823A CA 1055823 A CA1055823 A CA 1055823A CA 234469 A CA234469 A CA 234469A CA 1055823 A CA1055823 A CA 1055823A
Authority
CA
Canada
Prior art keywords
aluminium
etching
liquid
amount
alkali metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA234,469A
Other languages
English (en)
Other versions
CA234469S (en
Inventor
Gijsbertus Gerlagh
John J. Kelly
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA1055823A publication Critical patent/CA1055823A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/66—Wet etching of conductive or resistive materials
    • H10P50/663—Wet etching of conductive or resistive materials by chemical means only
    • H10P50/667—Wet etching of conductive or resistive materials by chemical means only by liquid etching only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/36—Alkaline compositions for etching aluminium or alloys thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
CA234,469A 1974-09-03 1975-08-29 Eau-forte pour graver l'aluminium Expired CA1055823A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7411645A NL7411645A (nl) 1974-09-03 1974-09-03 Etsvloeistof voor aluminium.

Publications (1)

Publication Number Publication Date
CA1055823A true CA1055823A (fr) 1979-06-05

Family

ID=19822017

Family Applications (1)

Application Number Title Priority Date Filing Date
CA234,469A Expired CA1055823A (fr) 1974-09-03 1975-08-29 Eau-forte pour graver l'aluminium

Country Status (11)

Country Link
JP (1) JPS5150834A (fr)
AT (1) AT336974B (fr)
BE (1) BE832966A (fr)
CA (1) CA1055823A (fr)
CH (1) CH616708A5 (fr)
DE (1) DE2537154A1 (fr)
FR (1) FR2283943A1 (fr)
GB (1) GB1499037A (fr)
IT (1) IT1042185B (fr)
NL (1) NL7411645A (fr)
SE (1) SE7509691L (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047588C2 (de) * 1980-12-17 1984-07-12 Siemens AG, 1000 Berlin und 8000 München Ätzflüssigkeit für Aufdampfschichten und Verfahren zur Ätzung von Dünnfilmstrukturen
US4425183A (en) * 1983-08-08 1984-01-10 Ncr Corporation Metal bevel process for multi-level metal semiconductor applications

Also Published As

Publication number Publication date
DE2537154A1 (de) 1976-03-18
JPS5150834A (fr) 1976-05-04
AT336974B (de) 1977-06-10
NL7411645A (nl) 1976-03-05
ATA672375A (de) 1976-09-15
FR2283943B1 (fr) 1980-09-12
SE7509691L (sv) 1976-03-04
GB1499037A (en) 1978-01-25
IT1042185B (it) 1980-01-30
CH616708A5 (en) 1980-04-15
FR2283943A1 (fr) 1976-04-02
BE832966A (fr) 1976-03-01

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