JPS5150834A - - Google Patents

Info

Publication number
JPS5150834A
JPS5150834A JP50105568A JP10556875A JPS5150834A JP S5150834 A JPS5150834 A JP S5150834A JP 50105568 A JP50105568 A JP 50105568A JP 10556875 A JP10556875 A JP 10556875A JP S5150834 A JPS5150834 A JP S5150834A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50105568A
Other languages
Japanese (ja)
Inventor
Geruragu Giisuberutsusu
Josefu Kerii Joon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of JPS5150834A publication Critical patent/JPS5150834A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/66—Wet etching of conductive or resistive materials
    • H10P50/663—Wet etching of conductive or resistive materials by chemical means only
    • H10P50/667—Wet etching of conductive or resistive materials by chemical means only by liquid etching only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/36—Alkaline compositions for etching aluminium or alloys thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP50105568A 1974-09-03 1975-08-30 Pending JPS5150834A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7411645A NL7411645A (nl) 1974-09-03 1974-09-03 Etsvloeistof voor aluminium.

Publications (1)

Publication Number Publication Date
JPS5150834A true JPS5150834A (fr) 1976-05-04

Family

ID=19822017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50105568A Pending JPS5150834A (fr) 1974-09-03 1975-08-30

Country Status (11)

Country Link
JP (1) JPS5150834A (fr)
AT (1) AT336974B (fr)
BE (1) BE832966A (fr)
CA (1) CA1055823A (fr)
CH (1) CH616708A5 (fr)
DE (1) DE2537154A1 (fr)
FR (1) FR2283943A1 (fr)
GB (1) GB1499037A (fr)
IT (1) IT1042185B (fr)
NL (1) NL7411645A (fr)
SE (1) SE7509691L (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3047588C2 (de) * 1980-12-17 1984-07-12 Siemens AG, 1000 Berlin und 8000 München Ätzflüssigkeit für Aufdampfschichten und Verfahren zur Ätzung von Dünnfilmstrukturen
US4425183A (en) * 1983-08-08 1984-01-10 Ncr Corporation Metal bevel process for multi-level metal semiconductor applications

Also Published As

Publication number Publication date
NL7411645A (nl) 1976-03-05
FR2283943A1 (fr) 1976-04-02
CH616708A5 (en) 1980-04-15
AT336974B (de) 1977-06-10
DE2537154A1 (de) 1976-03-18
FR2283943B1 (fr) 1980-09-12
GB1499037A (en) 1978-01-25
ATA672375A (de) 1976-09-15
BE832966A (fr) 1976-03-01
CA1055823A (fr) 1979-06-05
IT1042185B (it) 1980-01-30
SE7509691L (sv) 1976-03-04

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