AT523072A5 - Verfahren zum Bonden von Substraten - Google Patents
Verfahren zum Bonden von Substraten Download PDFInfo
- Publication number
- AT523072A5 AT523072A5 ATA9524/2014A AT95242014A AT523072A5 AT 523072 A5 AT523072 A5 AT 523072A5 AT 95242014 A AT95242014 A AT 95242014A AT 523072 A5 AT523072 A5 AT 523072A5
- Authority
- AT
- Austria
- Prior art keywords
- substrate
- substrates
- connecting material
- bonding substrates
- bonding
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
- C03C27/10—Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10807—Making laminated safety glass or glazing; Apparatus therefor
- B32B17/10899—Making laminated safety glass or glazing; Apparatus therefor by introducing interlayers of synthetic resin
- B32B17/10908—Making laminated safety glass or glazing; Apparatus therefor by introducing interlayers of synthetic resin in liquid form
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
- B32B37/1284—Application of adhesive
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
- C09J5/02—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving pretreatment of the surfaces to be joined
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P10/00—Bonding of wafers, substrates or parts of devices
- H10P10/12—Bonding of semiconductor wafers or semiconductor substrates to semiconductor wafers or semiconductor substrates
- H10P10/128—Bonding of semiconductor wafers or semiconductor substrates to semiconductor wafers or semiconductor substrates by direct semiconductor to semiconductor bonding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/011—Apparatus therefor
- H10W72/0113—Apparatus for manufacturing die-attach connectors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2400/00—Presence of inorganic and organic materials
- C09J2400/10—Presence of inorganic materials
- C09J2400/14—Glass
- C09J2400/143—Glass in the substrate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/013—Manufacture or treatment of die-attach connectors
- H10W72/01321—Manufacture or treatment of die-attach connectors using local deposition
- H10W72/01323—Manufacture or treatment of die-attach connectors using local deposition in liquid form, e.g. by dispensing droplets or by screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/013—Manufacture or treatment of die-attach connectors
- H10W72/01331—Manufacture or treatment of die-attach connectors using blanket deposition
- H10W72/01333—Manufacture or treatment of die-attach connectors using blanket deposition in liquid form, e.g. spin coating, spray coating or immersion coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/013—Manufacture or treatment of die-attach connectors
- H10W72/01365—Thermally treating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/013—Manufacture or treatment of die-attach connectors
- H10W72/01371—Cleaning, e.g. oxide removal or de-smearing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/019—Manufacture or treatment of bond pads
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07311—Treating the bonding area before connecting, e.g. by applying flux or cleaning
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07321—Aligning
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07321—Aligning
- H10W72/07323—Active alignment, e.g. using optical alignment using marks or sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07331—Connecting techniques
- H10W72/07337—Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy
- H10W72/07338—Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy hardening the adhesive by curing, e.g. thermosetting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/321—Structures or relative sizes of die-attach connectors
- H10W72/325—Die-attach connectors having a filler embedded in a matrix
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/331—Shapes of die-attach connectors
- H10W72/332—Plan-view shape, i.e. in top view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/331—Shapes of die-attach connectors
- H10W72/334—Cross-sectional shape, i.e. in side view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
- H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/59—Bond pads specially adapted therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Ceramic Engineering (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Manufacturing & Machinery (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Combinations Of Printed Boards (AREA)
Abstract
Die vorliegende Erfindung betrifft ein Verfahren zum Bonden eines ersten Substrats (1) mit einem zweiten Substrat (2) mittels einer zwischen den Substraten (1, 2) angeordneten Verbindungsschicht (7) aus einem Verbindungsmaterial (3, 5) mit folgenden Schritten: Aufbringen des Verbindungsmaterials (3, 5) auf das erste Substrat (1) und/oder das zweite Substrat (2) in flüssiger Form, Aufbringen des Verbindungsmaterials (3, 5) durch Schleuderbelackung oder Sprühbelackung gleichmäßig über eine Substratoberfläche (lo) des ersten unteren Substrats (1), Verteilen des Verbindungsmaterials (3, 5) zwischen den Substraten (1, 2) durch Annähern der Substrate (1, 2), wobei das Verteilen selbsttätig mittels der Kapillarkraft des flüssigen Verbindungsmaterials (3, 5) erfolgt, wobei eines der beiden Substrate (1, 2) nach einer Kontaktierung des mindestens einen Tropfens mit dem ersten unteren Substrat (1) freigelassen wird, und dadurch Ausbilden der Form der Verbindungsschicht (7) mit einer Dicke t, wobei das Verbindungsmaterial (3, 5) in einer überschussfreien Menge aufgebracht wird.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2014/063603 WO2015197126A1 (de) | 2014-06-26 | 2014-06-26 | Verfahren zum bonden von substraten mit verteilen eines verbindungsmaterials durch annähern der substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AT523072B1 AT523072B1 (de) | 2021-05-15 |
| AT523072A5 true AT523072A5 (de) | 2021-05-15 |
Family
ID=51022869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ATA9524/2014A AT523072B1 (de) | 2014-06-26 | 2014-06-26 | Verfahren zum Bonden von Substraten |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9929124B2 (de) |
| JP (1) | JP6495947B2 (de) |
| KR (2) | KR20170023816A (de) |
| CN (1) | CN106459676B (de) |
| AT (1) | AT523072B1 (de) |
| DE (1) | DE112014006648B4 (de) |
| SG (1) | SG11201610458WA (de) |
| TW (1) | TWI651771B (de) |
| WO (1) | WO2015197126A1 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102723083B1 (ko) * | 2017-01-17 | 2024-10-29 | 세키스이가가쿠 고교가부시키가이샤 | 충전 접합재, 보호 시트 부착 충전 접합재, 적층체, 광학 디바이스 및 광학 디바이스용 보호 패널 |
| JP7523983B2 (ja) * | 2020-07-22 | 2024-07-29 | キオクシア株式会社 | 半導体装置及び半導体装置の製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003091784A1 (de) * | 2002-04-25 | 2003-11-06 | Unaxis Balzers Ag | Verfahren zur herstellung einer keilfreien klebefuge |
| WO2011140469A1 (en) * | 2010-05-06 | 2011-11-10 | Zakaryae Fathi | Adhesive bonding composition and method of use |
| WO2012051003A2 (en) * | 2010-10-11 | 2012-04-19 | Henkel Corporation | Self-aligning adhesive using solvent and solventless organic resin system in electronic packaging |
| EP2695923A2 (de) * | 2012-08-07 | 2014-02-12 | PiOptix GmbH | Verfahren zur durchsichtigen Verklebung von transparenten Schichten |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000191985A (ja) * | 1998-12-25 | 2000-07-11 | Seiko Epson Corp | 部材の貼り合わせ方法、貼り合わせ体の製造方法及び貼り合わせ装置 |
| JP2002285132A (ja) * | 2001-03-23 | 2002-10-03 | Omron Corp | 部材貼り合わせ方法及びその装置 |
| JP3915604B2 (ja) * | 2002-06-10 | 2007-05-16 | 宇部興産株式会社 | 一液性エポキシ樹脂組成物および硬化物 |
| JP2004325788A (ja) | 2003-04-24 | 2004-11-18 | Sony Corp | 光学的検査方法及び光学的検査装置、並びに液晶表示装置の製造方法 |
| DE602006019317D1 (de) * | 2005-11-29 | 2011-02-10 | Seiko Instr Inc | Prozess zur display-herstellung und laminationsverfahren |
| JP4537974B2 (ja) * | 2006-04-12 | 2010-09-08 | パナソニック株式会社 | 部品実装機 |
| US20080216952A1 (en) * | 2007-03-06 | 2008-09-11 | Cheng Uei Precision Industry Co., Ltd. | Adhesive Method Of Optical Components |
| US20090183819A1 (en) | 2007-12-27 | 2009-07-23 | Tsutomu Matsuhira | Manufacturing method for a display device |
| JP2009289915A (ja) * | 2008-05-28 | 2009-12-10 | Sharp Corp | 半導体装置の製造方法及び製造装置 |
| JP2010174077A (ja) * | 2009-01-27 | 2010-08-12 | Sekisui Chem Co Ltd | 電子部品用接着剤 |
| CN102326239B (zh) * | 2009-03-10 | 2013-12-11 | 积水化学工业株式会社 | 半导体芯片层叠体的制造方法及半导体装置 |
| JP2010229272A (ja) * | 2009-03-26 | 2010-10-14 | Seiko Epson Corp | 接合方法および接合体 |
| JP2011133847A (ja) * | 2009-11-27 | 2011-07-07 | Canon Inc | 透光性基板の接着方法及びディスプレイの製造方法 |
| EP2666185A1 (de) * | 2011-01-17 | 2013-11-27 | Ev Group E. Thallner GmbH | Verfahren zum ablösen eines produktsubstrats von einem trägersubstrat |
| WO2013016859A1 (en) * | 2011-07-30 | 2013-02-07 | Stokvis Tapes (Shanghai) Co. Ltd. | Layered display device and fabrication method thereof |
| JP5990037B2 (ja) * | 2012-05-18 | 2016-09-07 | 東京応化工業株式会社 | 重ね合わせ装置および重ね合わせ方法 |
| DE102012112385B8 (de) * | 2012-08-07 | 2018-11-22 | Pioptix Gmbh | Verfahren zur durchsichtigen Verklebung von transparenten Schichten sowie mit diesem Verfahren hergestellte Displayvorrichtung |
| JP5612043B2 (ja) * | 2012-09-03 | 2014-10-22 | オリジン電気株式会社 | 接合部材の製造方法及び接合部材製造装置 |
| DE102013022563A1 (de) | 2013-11-29 | 2015-06-03 | Ev Group E Thallner Gmbh |
-
2014
- 2014-06-26 US US15/317,686 patent/US9929124B2/en active Active
- 2014-06-26 JP JP2016573584A patent/JP6495947B2/ja active Active
- 2014-06-26 DE DE112014006648.6T patent/DE112014006648B4/de active Active
- 2014-06-26 AT ATA9524/2014A patent/AT523072B1/de active
- 2014-06-26 CN CN201480079975.6A patent/CN106459676B/zh active Active
- 2014-06-26 KR KR1020167034718A patent/KR20170023816A/ko not_active Ceased
- 2014-06-26 WO PCT/EP2014/063603 patent/WO2015197126A1/de not_active Ceased
- 2014-06-26 SG SG11201610458WA patent/SG11201610458WA/en unknown
- 2014-06-26 KR KR1020217003860A patent/KR102311945B1/ko active Active
-
2015
- 2015-04-27 TW TW104113422A patent/TWI651771B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003091784A1 (de) * | 2002-04-25 | 2003-11-06 | Unaxis Balzers Ag | Verfahren zur herstellung einer keilfreien klebefuge |
| WO2011140469A1 (en) * | 2010-05-06 | 2011-11-10 | Zakaryae Fathi | Adhesive bonding composition and method of use |
| WO2012051003A2 (en) * | 2010-10-11 | 2012-04-19 | Henkel Corporation | Self-aligning adhesive using solvent and solventless organic resin system in electronic packaging |
| EP2695923A2 (de) * | 2012-08-07 | 2014-02-12 | PiOptix GmbH | Verfahren zur durchsichtigen Verklebung von transparenten Schichten |
Also Published As
| Publication number | Publication date |
|---|---|
| DE112014006648B4 (de) | 2025-11-13 |
| CN106459676B (zh) | 2020-01-10 |
| KR20210018968A (ko) | 2021-02-18 |
| WO2015197126A1 (de) | 2015-12-30 |
| CN106459676A (zh) | 2017-02-22 |
| TW201601204A (zh) | 2016-01-01 |
| JP2017527981A (ja) | 2017-09-21 |
| AT523072B1 (de) | 2021-05-15 |
| TWI651771B (zh) | 2019-02-21 |
| KR102311945B1 (ko) | 2021-10-13 |
| JP6495947B2 (ja) | 2019-04-03 |
| KR20170023816A (ko) | 2017-03-06 |
| DE112014006648A5 (de) | 2017-01-26 |
| US9929124B2 (en) | 2018-03-27 |
| SG11201610458WA (en) | 2017-01-27 |
| US20170117247A1 (en) | 2017-04-27 |
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