CA1311040C - Laser fluid flow control apparatus and method - Google Patents

Laser fluid flow control apparatus and method

Info

Publication number: CA1311040C
Authority: CA; Canada
Prior art keywords: laser; fluid; supplied; volume; control means
Prior art date: 1987-07-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

CA000573159A

Other languages

English (en)

French (fr)

Inventor

Carl J. Nilsen

Joseph P. Wachter

Ronald D. Young

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

PRC Corp

Original Assignee

PRC Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-07-27

Filing date

1988-07-27

Publication date

1992-12-01

1988-07-27 Application filed by PRC Corp filed Critical PRC Corp

1992-12-01 Application granted granted Critical

1992-12-01 Publication of CA1311040C publication Critical patent/CA1311040C/en

2009-12-01 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

239000012530 fluid Substances 0.000 title claims abstract description 210
238000000034 method Methods 0.000 title claims abstract description 21
239000000203 mixture Substances 0.000 claims abstract description 30
230000006872 improvement Effects 0.000 claims description 4
230000000977 initiatory effect Effects 0.000 claims description 4
238000002360 preparation method Methods 0.000 claims 2
230000008859 change Effects 0.000 abstract description 3
230000002708 enhancing effect Effects 0.000 abstract 1
239000007789 gas Substances 0.000 description 88
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
229910002092 carbon dioxide Inorganic materials 0.000 description 6
238000010586 diagram Methods 0.000 description 5
230000004044 response Effects 0.000 description 3
230000001960 triggered effect Effects 0.000 description 3
239000001569 carbon dioxide Substances 0.000 description 2
230000000694 effects Effects 0.000 description 2
229910052734 helium Inorganic materials 0.000 description 2
239000001307 helium Substances 0.000 description 2
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
230000004048 modification Effects 0.000 description 2
238000012986 modification Methods 0.000 description 2
230000015556 catabolic process Effects 0.000 description 1
238000006243 chemical reaction Methods 0.000 description 1
238000001816 cooling Methods 0.000 description 1
238000006731 degradation reaction Methods 0.000 description 1
230000005284 excitation Effects 0.000 description 1
238000001914 filtration Methods 0.000 description 1
ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
238000005096 rolling process Methods 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

Physics & Mathematics (AREA)
Electromagnetism (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Optics & Photonics (AREA)
Lasers (AREA)

CA000573159A 1987-07-27 1988-07-27 Laser fluid flow control apparatus and method Expired - Lifetime CA1311040C (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US07/078,096 US4794613A (en)	1987-07-27	1987-07-27	Laser fluid flow control apparatus and method
US078,096		1987-07-27

Publications (1)

Publication Number	Publication Date
CA1311040C true CA1311040C (en)	1992-12-01

Family

ID=22141886

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA000573159A Expired - Lifetime CA1311040C (en)	1987-07-27	1988-07-27	Laser fluid flow control apparatus and method

Country Status (8)

Country	Link
US (1)	US4794613A (de)
EP (1)	EP0374164B1 (de)
JP (1)	JPH02504447A (de)
AT (1)	ATE113144T1 (de)
AU (1)	AU603929B2 (de)
CA (1)	CA1311040C (de)
DE (1)	DE3851893T2 (de)
WO (1)	WO1989001252A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63229793A (ja) *	1987-03-19	1988-09-26	Fanuc Ltd	レ−ザ発振器配管系の異常検出装置
JP2706485B2 (ja) *	1988-10-07	1998-01-28	ファナック株式会社	レーザガス置換量制御方法
US4977573A (en) *	1989-03-09	1990-12-11	Questek, Inc.	Excimer laser output control device
GB8927209D0 (en) *	1989-12-01	1990-01-31	British Aerospace	Apparatus for controlling the composition of a laser gas or gas mixture
US5284438A (en) *	1992-01-07	1994-02-08	Koch Engineering Company, Inc.	Multiple purpose burner process and apparatus
JP4072544B2 (ja) *	2005-06-02	2008-04-09	ファナック株式会社	ガスレーザ装置
US9634455B1 (en)	2016-02-16	2017-04-25	Cymer, Llc	Gas optimization in a gas discharge light source

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3509486A (en) *	1965-10-28	1970-04-28	Bell Telephone Labor Inc	Gas laser employing carbon disulfide and nitrogen
US3605036A (en) *	1967-10-17	1971-09-14	Laser Sciences Inc	Method and apparatus for thermochemically controlling the gas atmosphere of a gas coherent radiation generator
US3566304A (en) *	1968-03-20	1971-02-23	Union Carbide Corp	Gas laser pressure control for maintaining constant pressure
US3596202A (en) *	1969-03-28	1971-07-27	Bell Telephone Labor Inc	Carbon dioxide laser operating upon a vibrational-rotational transition
US3648194A (en) *	1969-09-10	1972-03-07	United Aircraft Corp	Semiclosed cycle gas laser system
GB1256398A (en) *	1969-09-26	1971-12-08	Elliott Brothers London Ltd	Improvements in or relating to gas lasers
US3605038A (en) *	1970-04-30	1971-09-14	Ibm	Population inversion and gain in molecular gases excited by vibrationally excited hydrogen
US3641455A (en) *	1970-07-13	1972-02-08	North American Rockwell	Method and means for achieving chemical equilibrium in a sealed-off carbon dioxide laser
US3676797A (en) *	1970-12-21	1972-07-11	United Aircraft Corp	Atomic fluorine laser
US3704428A (en) *	1971-10-04	1972-11-28	Us Air Force	Carbon monoxide laser from helium-air-methane mixture
US3789320A (en) *	1972-06-19	1974-01-29	Ferranti Ltd	Gas laser circulation system
US3882414A (en) *	1972-10-05	1975-05-06	Mc Donnell Douglas Corp	Halide dissociative transfer laser
US3982200A (en) *	1973-09-04	1976-09-21	Avco Everett Research Laboratory, Inc.	Electron beam gas discharge laser pressure control
US3876957A (en) *	1973-10-15	1975-04-08	Holosonics Inc	Gas-ion laser with gas pressure maintenance means
US4210877A (en) *	1975-05-15	1980-07-01	Westinghouse Electric Corp.	Split ground state atomic iodine or bromine laser
US4196399A (en) *	1978-01-09	1980-04-01	The United States Of America As Represented By The Secretary Of The Army	Repetitively pulsed, cold cathode e-beam, self-switch laser
US4283686A (en) *	1979-03-21	1981-08-11	Avco Everett Research Laboratory, Inc.	Laser operation with closed gas and tuned duct pulsing
JPS56142688A (en) *	1980-04-04	1981-11-07	Matsushita Electric Ind Co Ltd	Driving method of gas laser
JPS5723288A (en) *	1980-07-16	1982-02-06	Matsushita Electric Ind Co Ltd	Laser device
US4429392A (en) *	1981-12-21	1984-01-31	Sumitomo Electric Industries, Ltd.	Laser output controlling device
JPS58223385A (ja) *	1982-06-22	1983-12-24	Nec Corp	イオンレ−ザ装置
JPS5989478A (ja) *	1982-11-15	1984-05-23	Nec Corp	イオンレーザ装置
DE3305152A1 (de) *	1983-02-15	1984-08-16	Rofin-Sinar Laser GmbH, 2000 Hamburg	Gasdurchfluss-laser
US4661958A (en) *	1983-05-06	1987-04-28	Coherent, Inc.	Laser
US4547885A (en) *	1983-05-06	1985-10-15	Coherent, Inc.	Active pressure regulator for a gas laser
JPS6080285A (ja) *	1983-10-07	1985-05-08	Matsushita Electric Ind Co Ltd	ガスレ−ザ装置
JPS60115280A (ja) *	1983-11-28	1985-06-21	Inoue Japax Res Inc	気体レ−ザ発振器
JPS60211581A (ja) *	1984-04-04	1985-10-23	Matsushita Electric Ind Co Ltd	情報圧縮方法およびその回路

1987
- 1987-07-27 US US07/078,096 patent/US4794613A/en not_active Expired - Lifetime
1988
- 1988-07-26 EP EP88906706A patent/EP0374164B1/de not_active Expired - Lifetime
- 1988-07-26 AT AT88906706T patent/ATE113144T1/de not_active IP Right Cessation
- 1988-07-26 JP JP63506623A patent/JPH02504447A/ja active Pending
- 1988-07-26 WO PCT/US1988/002533 patent/WO1989001252A1/en not_active Ceased
- 1988-07-26 AU AU22511/88A patent/AU603929B2/en not_active Ceased
- 1988-07-26 DE DE3851893T patent/DE3851893T2/de not_active Expired - Fee Related
- 1988-07-27 CA CA000573159A patent/CA1311040C/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0374164B1 (de)	1994-10-19
US4794613A (en)	1988-12-27
ATE113144T1 (de)	1994-11-15
JPH02504447A (ja)	1990-12-13
EP0374164A4 (en)	1990-10-10
DE3851893T2 (de)	1995-03-16
DE3851893D1 (de)	1994-11-24
AU603929B2 (en)	1990-11-29
EP0374164A1 (de)	1990-06-27
AU2251188A (en)	1989-03-01
WO1989001252A1 (en)	1989-02-09

Legal Events

Date	Code	Title	Description
1998-12-01	MKLA	Lapsed

Publication	Publication Date	Title
CA1311040C (en)	1992-12-01	Laser fluid flow control apparatus and method
EP1367325A1 (de)	2003-12-03	Steuerung einer Brennstoffversorgung für eine Gasturbine mit mehreren Magnetventilen
EP2618433B1 (de)	2019-08-21	Laserverarbeitungsvorrichtung und verfahren zur steuerung der laserverarbeitungsvorrichtung
US20130220981A1 (en)	2013-08-29	Control device and control method for laser processing machine
EP0394473A1 (de)	1990-10-31	Regelungssystem der zu ersetzenden lasergasmenge
JP3822304B2 (ja)	2006-09-20	プラズマ加工用電源装置
JP2663864B2 (ja)	1997-10-15	エキシマレーザ
EP1729378A1 (de)	2006-12-06	Gaslaservorrichtung
CN105896238A (zh)	2016-08-24	具备鼓风机的激光振荡器
US6908299B2 (en)	2005-06-21	Combustion apparatus
JP2682091B2 (ja)	1997-11-26	ガス循環式レーザ発振器のガス制御方法
JPH04174578A (ja)	1992-06-22	気体レーザ発振器に於けるレーザガス供給制御装置
CN117438276B (zh)	2025-09-05	一种微波等离子体源多模式气体切换装置及方法
JPH0636446B2 (ja)	1994-05-11	レ−ザ発振器
JP3779010B2 (ja)	2006-05-24	エキシマレーザ装置のガス供給制御装置およびガス供給制御方法
JPH01288320A (ja)	1989-11-20	アンモニア脱硝装置の制御方法
JPH08319895A (ja)	1996-12-03	ガス昇圧装置の制御方法及び制御装置
JPH02185626A (ja)	1990-07-20	ガスタービン用蒸気供給設備および蒸気噴射方法
JPH0735348A (ja)	1995-02-07	燃焼装置
JPH04137576A (ja)	1992-05-12	放電励起式ガスレーザ発振器
JPH0513842A (ja)	1993-01-22	レーザー発振器の冷却装置
JPH02144979A (ja)	1990-06-04	ガスレーザ装置
JPH07127844A (ja)	1995-05-16	石油バーナ装置
JPH09296775A (ja)	1997-11-18	電磁ポンプおよび液体燃料供給装置
SU1183037A1 (ru)	1985-10-07	УСТРОЙСТВО ДЛЯ ЗАМОРАЖИВАНИЯ БИОЛОГИЧЕСКИХ ОБЪЕКТОВ, содержащее резервуар